JPS58115808A - Method of producing laminated porcelain condenser - Google Patents
Method of producing laminated porcelain condenserInfo
- Publication number
- JPS58115808A JPS58115808A JP21116381A JP21116381A JPS58115808A JP S58115808 A JPS58115808 A JP S58115808A JP 21116381 A JP21116381 A JP 21116381A JP 21116381 A JP21116381 A JP 21116381A JP S58115808 A JPS58115808 A JP S58115808A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- dielectric layer
- dielectric
- paste
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
(13*明の技術分野
本発明はそりの発生を無くした積層形像器コンデンサの
製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a multilayer imager capacitor that eliminates warpage.
(2) 技術の背景
積層形像器コンデンサはハイブリ、ド基板上に直II蓄
軟される手形大容量の磁器コンデンサであって、電極は
み出し構造がとられて潰り、非常に小さいのでチップコ
ンデンサとも云われている。(2) Background of the technology Multilayer image capacitors are hand-shaped, large-capacity ceramic capacitors that are directly stored on a hybrid substrate, and have a protruding electrode structure that causes them to collapse. It is also said that
第1図^はか\る積層形像器コンデンサの断面図また但
)はこの正面図であって、下部ダミー用誘電体層lの上
に電極パターン2がスクリーン印刷された誘電体層3が
電極はみ出し構造をとって積層され最上部には下部ダミ
ー用鱒電体層lと同じ厚さをもつ上部ダミー用誘電体層
4が設けられ才た側面には導電性塗料により端子電極5
が設けられている。Figure 1 is a cross-sectional view of a multilayer imager capacitor, and a front view thereof, in which a dielectric layer 3 with an electrode pattern 2 screen-printed on the lower dummy dielectric layer l is shown. The electrodes are laminated with a protruding structure, and an upper dummy dielectric layer 4 having the same thickness as the lower dummy electric layer 1 is provided at the top, and a terminal electrode 5 is coated with conductive paint on the lower side.
is provided.
このような電極はみ出し構造をとるコンデンサにおいて
は第1図田Jに示すように誘電体層3を挾んで存在する
上の電極パターン2′と下の電極パターン2とが相互に
重なった部分が実効的な電41面積として働らく。か\
る積層形像器コンデン賀以下テ、プコンデンサ)は7−
F状に形成された生シート(グリーンシート)を力、メ
を用いて電極パターンに合わせて切断し焼成すること−
こより作成されるが、こ\で生シートの作り方としては
次02つの方法がある。In a capacitor with such an electrode protruding structure, as shown in Figure 1, the effective part is the overlap between the upper electrode pattern 2' and the lower electrode pattern 2, which are present with the dielectric layer 3 in between. It works as a 41 area electric current. mosquito\
The laminated imager capacitor (capacitor) is 7
Cutting a raw sheet (green sheet) formed into an F shape according to the electrode pattern using force or a machine and firing it.
It is created from this, but there are two ways to make a raw sheet.
1、電極パターンを印刷した薄いシートを必要な枚数だ
け位置合わせしながら積層し、これらを圧着して化7−
トとするもの。1. Laminate the required number of thin sheets with electrode patterns printed on them while aligning them, and press them together to form a chemical compound.
What to do.
2、電極パターンのみならず誘電層もスクリーン印刷に
より形成して化ソートを作るもの。2. A chemical sort is created by forming not only the electrode pattern but also the dielectric layer by screen printing.
本発明は後者の方法で作られるテップコンデンサに関す
るものである。The present invention relates to a step capacitor made by the latter method.
(3)従来技術と問題点
従来の化7−トの作り方としては離型剤を塗布した金属
箔或はポリエチレンテレフタレートのような合成樹脂フ
ィルムを基板としこの上にスクリーン印刷法により第1
図のような構成の生シートを形成してゆく。(3) Prior art and problems The conventional way to make chemical sheets is to use a metal foil coated with a mold release agent or a synthetic resin film such as polyethylene terephthalate as a substrate, and then print the first film on the substrate using a screen printing method.
A raw sheet with the structure shown in the figure is formed.
例えばスクリーン印刷法で厚さ約200μmの下部ダミ
一層1を約20cIL角に一様に形成後、導電ペースト
例えば銀・パラジウム(ん・Pd) 系ペーストを電極
パターン2ζこ合わせて3〜5μmの厚さに印刷し、次
に乾燥後、誘電体ペーストを約40膚の厚さに一様ζこ
印刷して誘電体層3を形成し乾燥する操作を必要とする
回数に亘って繰返し最後に下部ダミ一層1と同じ厚さに
誘電体ペーストを印刷して上部ダミ一層4を形成し、基
板より剥離することにより生シートは出来上る。For example, after forming a lower dummy layer 1 with a thickness of about 200 μm uniformly in a square of about 20 cIL using a screen printing method, conductive paste such as silver/palladium (Pd) based paste is applied to the electrode pattern 2ζ to a total thickness of 3 to 5 μm. Then, after drying, the dielectric paste is uniformly printed to a thickness of about 40 mm to form the dielectric layer 3, and the operation of drying is repeated as many times as necessary. A green sheet is completed by printing dielectric paste to the same thickness as the dummy layer 1 to form an upper dummy layer 4 and peeling it off from the substrate.
次に電極パターンに合わせて力、ターを用いて切断し約
1250℃の高温にて約2時間に亘って焼成したる後端
面に銀焼付けして端子電極5を設けることによりチップ
コンデンサが完成する。Next, the chip capacitor is completed by cutting it using force and a cutter according to the electrode pattern, baking it at a high temperature of about 1250° C. for about 2 hours, and baking silver on the rear end surface to provide the terminal electrode 5. .
然し乍らこのようにして形成したコンデンサは第2図に
示すように基板に接していた方向に彎曲する性質がある
。この理由は基板上にスクリーン印刷法により誘電体ペ
ーストおよび導体ペーストを塗布し積層してゆく場合、
基板ζこ接する印刷面はその面積が固定されているのに
対し上方は機械へ
的束縛が無くまた印刷により層形式が行われる毎に乾燥
処理が行われるために溶剤は蒸発し、そのため積層が進
むに従って上層の密度は下層に較べて増大してゆく。However, the capacitor formed in this manner has a tendency to curve in the direction in which it was in contact with the substrate, as shown in FIG. The reason for this is that when dielectric paste and conductive paste are applied and laminated by screen printing on the board,
The area of the printed surface that comes into contact with the substrate is fixed, whereas the area above is not constrained by the machine, and each time a layer is formed by printing, a drying process is performed, so the solvent evaporates, and therefore the lamination is not possible. As it progresses, the density of the upper layer increases compared to the lower layer.
11311はこの傾向の説明図であって横軸は化7−ト
の密屓をまた縦軸はシートの厚さを示し曲線6はこの密
度の変化の傾向を示している。Reference numeral 11311 is an explanatory diagram of this tendency, in which the horizontal axis shows the density of the compound, the vertical axis shows the sheet thickness, and curve 6 shows the tendency of this density change.
それで上部ダミー用誘電体層形成後基板から剥離した状
態では下部ダミー用誘電体層の密度は小さく、これがチ
ップコンデンサの大きさに切断後1000℃以上の高温
で焼成される場合、焼結が進行して強誘電体ll器の密
度が一様となる結果、下層の収縮度が大きく、そのため
#!2図に示すようなそりがチップコンデンサに生じる
のである。こ\でチップもンデンサにそりが生じると、
これ!ま外観不良となるばかりでなく層間剥離やチップ
の割れを生じ不良発生の原因となる。そのためにそりの
無いチップを作る方法として従来は焼成の際の積み重ね
方法を工夫するなどや方法かとられていたが、そりを解
消するよい方法は見出せないで猟在に到っている。Therefore, the density of the lower dummy dielectric layer is small when it is peeled off from the substrate after forming the upper dummy dielectric layer, and when it is cut into the size of a chip capacitor and fired at a high temperature of 1000°C or higher, sintering progresses. As a result, the density of the ferroelectric layer becomes uniform, and as a result, the degree of shrinkage of the lower layer is large, and therefore #! Warpage as shown in Figure 2 occurs in the chip capacitor. If this causes warping of the chip and the capacitor,
this! Not only does this result in poor appearance, but it also causes delamination and cracking of the chip, leading to defects. For this reason, conventional methods for making chips without warpage have included devising the stacking method during firing, but no good method has been found to eliminate warpage.
(4) 発明の目−的
本頻明は誘電体ペーストの組成を変えることによってそ
りの発生を伴はないチップコンデンサの製造方法を提供
するにある。(4) Object of the Invention An object of the present invention is to provide a method for manufacturing a chip capacitor that does not cause warpage by changing the composition of a dielectric paste.
(5] 発明の構成
本発明は上部ダミ一層4の形成に用いる誘電体ペースト
の組成を下部ダミ一層lおよび誘電体層3の形成に使用
するものと変えることにより焼成の際にそりが発生しな
いようにするものである。(5) Structure of the Invention The present invention prevents warping during firing by changing the composition of the dielectric paste used for forming the upper dummy layer 4 to that used for forming the lower dummy layer 1 and the dielectric layer 3. It is intended to do so.
すなわち第3図に示すように多層構造をなして存在する
誘電体層は上層に行くに従って密度が大になっているが
、この最上層に設ける上部ダミ+層を低密度の誘電体ペ
ーストで形成することにより密度の不均一分布を匡正す
るものである。In other words, as shown in Figure 3, the dielectric layers that exist in a multilayer structure have a density that increases toward the top, but the upper dummy layer provided on the top layer is formed from a dielectric paste with a low density. This corrects the non-uniform density distribution.
こ\でチップコンデンサにおいて層構成している誘電体
層の厚さは絶縁抵抗が低下しない限りなるべく薄い方が
大容量化のため有利であり、この実施例の場合約40μ
mのものを用いている。一方r
下物ダミ一層および上部ダミ一層はコンデンサの外装兼
保護層としてかなりの厚さが必要であり、この実施例の
場合は約200 amの款布厚のものを用いている。そ
れ故lO数層の多層化を行い、上下間でかなりの密度差
が生じていてもこれ−こよる歪は厚い上部ダミ一層によ
って属正が可能になる。As for the thickness of the dielectric layer that constitutes the chip capacitor, it is advantageous to make it as thin as possible in order to increase the capacitance as long as the insulation resistance does not decrease, and in this example, it is approximately 40μ.
m is used. On the other hand, the lower dummy layer and the upper dummy layer need to have a considerable thickness as an exterior and protective layer for the capacitor, and in this embodiment, a thickness of about 200 am is used. Therefore, even if there is a considerable density difference between the upper and lower layers by multilayering several layers of lO, the strain caused by this can be corrected by a single thick upper dummy layer.
さて誘電体ペースト塗布層における密度調整はバインダ
の配合量を変えることにより行はれる。Now, the density of the dielectric paste coating layer can be adjusted by changing the blending amount of the binder.
すなわち誘電体ペーストは誘電体粉末を主構成剤としバ
インダ、分散剤および溶剤から構成されているが、こ\
で溶剤は塗布後の乾燥処理において一部のものは蒸発し
、一方パインダおよび分散剤などの有機物は約1250
℃で2時間に亘って行われる焼成工程番こおいて酸化さ
れ、炭酸ガスおよび水蒸気となって分解し、また誘電体
粉末を構成するチタン酸バリウム(BaTlOa )な
どの微粉末は焼結が進行して緻密な誘電体層が形成され
る。In other words, dielectric paste is mainly composed of dielectric powder, binder, dispersant, and solvent.
Some of the solvents evaporate during the drying process after coating, while organic substances such as binders and dispersants
During the firing process, which is carried out for 2 hours at As a result, a dense dielectric layer is formed.
こ\でバインダは樹脂および可塑剤からなっているが、
誘電体磁器粉末1009を主構成材としバインダの添加
量を18.j9としてこの実験ξこ用いた誘電体ペース
トの形成例を示すと次のようにな811表
本発明はバインダの構成比を@1表の1!麹例より変え
ることにより誘電体ペースト塗布層の密度調整を行い、
これにより焼成後に現われるそりを無(すものである。Here, the binder consists of resin and plasticizer,
The main component is dielectric ceramic powder 1009, and the amount of binder added is 18. An example of the formation of the dielectric paste used in this experiment ξ is shown below as j9. Table 811 In the present invention, the composition ratio of the binder is set to 1 in Table 1! Adjust the density of the dielectric paste coating layer by changing the koji example.
This eliminates the warpage that appears after firing.
以下実施例についてこの効果を説明する。This effect will be explained below with reference to Examples.
(6)発明の実施例
誘電体ペーストを構成する材料は第1!!と同一とし1
ll1体磁器粉末1009に対するバインダの添加量の
みを165.18p、20.9および22gと変えて4
種類の誘電体ペーストを作成し、バインダの添加1i1
6.9のペーストを用いて下部ダミ一層および誘電体層
を形成し、上部ダミ一層はバインダの添加量をそれぞれ
変えたペーストを用いて10層構成のチップコンデンサ
を作った。こ\でダミ一層の厚さは各200μmまた誘
電層の厚さは約40μmであり、チップコンデンサの大
きさは4、5 X 2.−また焼成条件は1250℃、
2時間である。(6) Embodiment of the Invention The material constituting the dielectric paste is the first! ! Same as 1
4 by changing only the amount of binder added to ll1 body porcelain powder 1009 to 165.18p, 20.9 and 22g.
Create dielectric paste of different types and add binder 1i1
A chip capacitor having a 10-layer structure was manufactured by forming a lower dummy layer and a dielectric layer using the paste No. 6.9, and using pastes with different amounts of binder added for the upper dummy layer. In this case, the thickness of each dummy layer is 200 μm, the thickness of the dielectric layer is about 40 μm, and the size of the chip capacitor is 4.5×2. - Also, the firing conditions are 1250℃,
It is 2 hours.
実験の結果として上部ダミ一層を形成するペーストのバ
インダ量を変えることにより発生するそりのl11Kが
異るが、それ以外に多層電極間の層間剥離および素子割
れなどの現象も発生する。こ\でバインダの含有量によ
りそりの発生を調節する本発明を実輸する場合に含有量
が大すぎる場合は従来と逆方向にそると云う現象も現わ
れる。こ\でそり量を定量的に示す方法としてjg2図
に示すようにチップを平面に置いた場合の中央部のそり
の高さ△Xで表わす。As a result of experiments, the amount of the binder in the paste forming the upper dummy layer differs in the warpage l11K, but other phenomena such as delamination between the multilayer electrodes and element cracking also occur. When the present invention, in which the occurrence of warpage is controlled by the binder content, is put into practice, if the binder content is too large, the phenomenon of warping in the opposite direction to that of the conventional method may occur. Here, the amount of warpage can be quantitatively expressed by the height ΔX of the warp at the center when the chip is placed on a flat surface as shown in figure jg2.
菖2表はこれらの測定結果である。Table 2 shows the results of these measurements.
第2表
こ\で本*m例の場合従来の方法すなわちバインダ添加
量が16gの場合0.3mのそりを生じまた層間剥離お
よび素子割れなどの現象が生じたのに対し添加量を増す
に従ってそりが無くなりまた才た層間剥離などの現象が
無くなることが判る。Table 2 shows that in the case of this *m example, when using the conventional method, that is, when the amount of binder added was 16 g, warping of 0.3 m occurred, and phenomena such as delamination and element cracking occurred, but as the amount of added binder was increased, It can be seen that there is no warping and phenomena such as severe delamination are also eliminated.
然し添加量が適量を超過すると逆方向へのそりを生じ層
間剥離などの現象が現われてくる。However, if the amount added exceeds the appropriate amount, warping in the opposite direction will occur and phenomena such as delamination will occur.
(7) 発明の効果
本発明はチップコンデンサの製造において生ずるそりを
無くするためになされたものであり、上部ダミ一層形成
に使用する誘電体ペースト中のバインダ含有量を増すこ
とにより塗布層を低密度化しそれにより多層(しの際に
発生する密度の不均一性を相殺することを本旨とするも
のである。(7) Effects of the Invention The present invention was made in order to eliminate warpage that occurs in the manufacture of chip capacitors, and by increasing the binder content in the dielectric paste used to form the upper dummy layer, the coating layer can be reduced. The main purpose is to increase the density and thereby offset the non-uniformity of density that occurs when forming multiple layers.
こ\で適正なバインダ含有量は10層構造をとり4.5
X 2. Omの大きさのチップコンデンサの場合1
8〜20pすなわち下層に対して11〜22チ増となっ
ているがチップの大きさおよび暦数には各種のものがあ
り、そりの大きさはチップの形状寸法および積層数に比
例して当然に増加する。In this case, the appropriate binder content is 4.5 with a 10-layer structure.
X 2. For a chip capacitor with a size of Om 1
8 to 20p, that is, 11 to 22 inches more than the lower layer, but there are various chip sizes and calendar numbers, and the size of warpage is naturally proportional to the chip shape and number of layers. increases to
本発明は製造せんとするチップコンデンサの形状寸法お
よび積層数を勘案して下部ダミ一層形成薯と使用する誘
電体ペーストのバインダ含有量を増加するもので本発明
の実施によりそりに原因する層間剥離や素子割れが無く
なり製造歩留りの向上に留まらずチップコンデンサの信
頼度を向上することができた。The present invention increases the binder content of the dielectric paste used for forming a single-layer lower dummy in consideration of the shape and dimensions of the chip capacitor to be manufactured and the number of laminated layers. This not only improves manufacturing yield but also improves the reliability of chip capacitors.
111EI図は囚は積層形磁器コンデンサの断面図、C
B)は正面図、第2図は積層形磁器コンデンサのそりを
示す説明図また第3図は生ンート中の密度分布の説明図
である。
図においてlは下部ダミー用誘電体mち2は電極パター
ン、3は誘電体層、4は上部ダミー用誘電体層
Q ’nFigure 111EI is a cross-sectional view of a multilayer ceramic capacitor, C
B) is a front view, FIG. 2 is an explanatory diagram showing the warpage of a multilayer ceramic capacitor, and FIG. 3 is an explanatory diagram of the density distribution in the raw tube. In the figure, l is the lower dummy dielectric m, 2 is the electrode pattern, 3 is the dielectric layer, and 4 is the upper dummy dielectric layer Q'n.
Claims (1)
貴金属を主体とする導体ペーストとを交互にスクリーン
印刷して誘電体層の間に電極パターンが互い違いに層形
成された構造のソートを作成し、該シートを所定の寸法
に切断後これを焼成してなる多層磁器コンデンサの製造
において、該コンデンサの上部ダミー用誘電体層をスク
リーン印刷する際に使用する誘電体ペーストのバインダ
量を下部ダミー用誘電体層および中間の誘電体層の形成
に使用する1IIE体ペーストよりもlO〜3〇−多く
含有するものを用いてなることを特徴とする積層形像器
コンデンサの製造方法。A sorting structure is created in which electrode patterns are alternately formed between the dielectric layers by alternately screen printing a dielectric paste mainly composed of strong-electric ceramic powder and a conductor paste mainly composed of high-melting point noble metals. In the production of multilayer porcelain capacitors by cutting the sheet into predetermined dimensions and firing it, the amount of binder in the dielectric paste used when screen printing the upper dummy dielectric layer of the capacitor is 1. A method for manufacturing a multilayer image capacitor, characterized in that a dummy dielectric layer and an intermediate dielectric layer are formed using a 1IIE paste containing 1O to 30- more than the 1IIE paste used to form the dummy dielectric layer and the intermediate dielectric layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21116381A JPS58115808A (en) | 1981-12-28 | 1981-12-28 | Method of producing laminated porcelain condenser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21116381A JPS58115808A (en) | 1981-12-28 | 1981-12-28 | Method of producing laminated porcelain condenser |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58115808A true JPS58115808A (en) | 1983-07-09 |
Family
ID=16601436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21116381A Pending JPS58115808A (en) | 1981-12-28 | 1981-12-28 | Method of producing laminated porcelain condenser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58115808A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01226141A (en) * | 1988-03-07 | 1989-09-08 | Matsushita Electric Ind Co Ltd | Green sheet for laminated porcelain capacitor |
JPH02117116A (en) * | 1988-10-27 | 1990-05-01 | Matsushita Electric Ind Co Ltd | Manufacture of laminated ceramic capacitor |
JPH08236392A (en) * | 1995-02-23 | 1996-09-13 | Nec Corp | Manufacture of laminated ceramic electronic component |
JP2013135178A (en) * | 2011-12-27 | 2013-07-08 | Ngk Spark Plug Co Ltd | Laminated electronic component and method for manufacturing the same |
-
1981
- 1981-12-28 JP JP21116381A patent/JPS58115808A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01226141A (en) * | 1988-03-07 | 1989-09-08 | Matsushita Electric Ind Co Ltd | Green sheet for laminated porcelain capacitor |
JP2506905B2 (en) * | 1988-03-07 | 1996-06-12 | 松下電器産業株式会社 | Green sheet for laminated porcelain capacitors |
JPH02117116A (en) * | 1988-10-27 | 1990-05-01 | Matsushita Electric Ind Co Ltd | Manufacture of laminated ceramic capacitor |
JP2506998B2 (en) * | 1988-10-27 | 1996-06-12 | 松下電器産業株式会社 | Manufacturing method of multilayer ceramic capacitor |
JPH08236392A (en) * | 1995-02-23 | 1996-09-13 | Nec Corp | Manufacture of laminated ceramic electronic component |
JP2013135178A (en) * | 2011-12-27 | 2013-07-08 | Ngk Spark Plug Co Ltd | Laminated electronic component and method for manufacturing the same |
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