JPS58112341A - 集積回路解析装置 - Google Patents

集積回路解析装置

Info

Publication number
JPS58112341A
JPS58112341A JP56210563A JP21056381A JPS58112341A JP S58112341 A JPS58112341 A JP S58112341A JP 56210563 A JP56210563 A JP 56210563A JP 21056381 A JP21056381 A JP 21056381A JP S58112341 A JPS58112341 A JP S58112341A
Authority
JP
Japan
Prior art keywords
specimen
electron beam
stage
integrated circuit
optical microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56210563A
Other languages
English (en)
Japanese (ja)
Other versions
JPS629218B2 (de
Inventor
Akio Ito
昭夫 伊藤
Yoshiaki Goto
後藤　善朗
Yasuo Furukawa
古川　泰男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56210563A priority Critical patent/JPS58112341A/ja
Publication of JPS58112341A publication Critical patent/JPS58112341A/ja
Publication of JPS629218B2 publication Critical patent/JPS629218B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316—Testing of analog circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
JP56210563A 1981-12-26 1981-12-26 集積回路解析装置 Granted JPS58112341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56210563A JPS58112341A (ja) 1981-12-26 1981-12-26 集積回路解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56210563A JPS58112341A (ja) 1981-12-26 1981-12-26 集積回路解析装置

Publications (2)

Publication Number Publication Date
JPS58112341A true JPS58112341A (ja) 1983-07-04
JPS629218B2 JPS629218B2 (de) 1987-02-27

Family

ID=16591387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56210563A Granted JPS58112341A (ja) 1981-12-26 1981-12-26 集積回路解析装置

Country Status (1)

Country Link
JP (1) JPS58112341A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197575A (ja) * 1984-10-19 1986-05-16 Jeol Ltd 電子線を用いた電位測定装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371102A (ja) * 1989-08-11 1991-03-26 Hitachi Ltd 光通信用モジュール

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5388565A (en) * 1977-01-14 1978-08-04 Shimadzu Corp Sample position deciding device for electronic analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5388565A (en) * 1977-01-14 1978-08-04 Shimadzu Corp Sample position deciding device for electronic analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197575A (ja) * 1984-10-19 1986-05-16 Jeol Ltd 電子線を用いた電位測定装置

Also Published As

Publication number Publication date
JPS629218B2 (de) 1987-02-27

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