JPS58100675A - 連続蒸着方法及びその装置 - Google Patents

連続蒸着方法及びその装置

Info

Publication number
JPS58100675A
JPS58100675A JP19847681A JP19847681A JPS58100675A JP S58100675 A JPS58100675 A JP S58100675A JP 19847681 A JP19847681 A JP 19847681A JP 19847681 A JP19847681 A JP 19847681A JP S58100675 A JPS58100675 A JP S58100675A
Authority
JP
Japan
Prior art keywords
vapor
strip
vapor deposition
chamber
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19847681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS633949B2 (enrdf_load_html_response
Inventor
Kenichi Yanagi
謙一 柳
Toshio Taguchi
田口　俊夫
Shigeo Itano
板野　重夫
Tetsuyoshi Wada
哲義 和田
Heizaburo Furukawa
古川　平三郎
Kanji Wake
和気　完治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP19847681A priority Critical patent/JPS58100675A/ja
Publication of JPS58100675A publication Critical patent/JPS58100675A/ja
Publication of JPS633949B2 publication Critical patent/JPS633949B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP19847681A 1981-12-11 1981-12-11 連続蒸着方法及びその装置 Granted JPS58100675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19847681A JPS58100675A (ja) 1981-12-11 1981-12-11 連続蒸着方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19847681A JPS58100675A (ja) 1981-12-11 1981-12-11 連続蒸着方法及びその装置

Publications (2)

Publication Number Publication Date
JPS58100675A true JPS58100675A (ja) 1983-06-15
JPS633949B2 JPS633949B2 (enrdf_load_html_response) 1988-01-26

Family

ID=16391737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19847681A Granted JPS58100675A (ja) 1981-12-11 1981-12-11 連続蒸着方法及びその装置

Country Status (1)

Country Link
JP (1) JPS58100675A (enrdf_load_html_response)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021379A (ja) * 1983-07-18 1985-02-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JPS6049150U (ja) * 1983-09-08 1985-04-06 日立マクセル株式会社 真空蒸着装置
JPS62287068A (ja) * 1986-06-06 1987-12-12 Nissin Electric Co Ltd イオンビ−ム蒸着装置
JPS62198268U (enrdf_load_html_response) * 1986-06-06 1987-12-17
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier
JP2002285324A (ja) * 2001-03-28 2002-10-03 Matsushita Electric Ind Co Ltd 蒸着装置及び方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546878A (en) * 1977-06-20 1979-01-19 Fuji Photo Film Co Ltd Continuous vapor deposition apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546878A (en) * 1977-06-20 1979-01-19 Fuji Photo Film Co Ltd Continuous vapor deposition apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021379A (ja) * 1983-07-18 1985-02-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JPS6049150U (ja) * 1983-09-08 1985-04-06 日立マクセル株式会社 真空蒸着装置
JPS62287068A (ja) * 1986-06-06 1987-12-12 Nissin Electric Co Ltd イオンビ−ム蒸着装置
JPS62198268U (enrdf_load_html_response) * 1986-06-06 1987-12-17
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier
JP2002285324A (ja) * 2001-03-28 2002-10-03 Matsushita Electric Ind Co Ltd 蒸着装置及び方法

Also Published As

Publication number Publication date
JPS633949B2 (enrdf_load_html_response) 1988-01-26

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