JPS5797646A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5797646A JPS5797646A JP17427580A JP17427580A JPS5797646A JP S5797646 A JPS5797646 A JP S5797646A JP 17427580 A JP17427580 A JP 17427580A JP 17427580 A JP17427580 A JP 17427580A JP S5797646 A JPS5797646 A JP S5797646A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- layer
- oxide film
- film
- grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052710 silicon Inorganic materials 0.000 abstract 4
- 239000010703 silicon Substances 0.000 abstract 4
- 239000013078 crystal Substances 0.000 abstract 3
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17427580A JPS5797646A (en) | 1980-12-10 | 1980-12-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17427580A JPS5797646A (en) | 1980-12-10 | 1980-12-10 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5797646A true JPS5797646A (en) | 1982-06-17 |
| JPS6137781B2 JPS6137781B2 (enrdf_load_stackoverflow) | 1986-08-26 |
Family
ID=15975803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17427580A Granted JPS5797646A (en) | 1980-12-10 | 1980-12-10 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5797646A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62153872U (enrdf_load_stackoverflow) * | 1986-03-20 | 1987-09-30 |
-
1980
- 1980-12-10 JP JP17427580A patent/JPS5797646A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6137781B2 (enrdf_load_stackoverflow) | 1986-08-26 |
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