JPS5790900A - Neutral particle incident device ion source - Google Patents

Neutral particle incident device ion source

Info

Publication number
JPS5790900A
JPS5790900A JP55167466A JP16746680A JPS5790900A JP S5790900 A JPS5790900 A JP S5790900A JP 55167466 A JP55167466 A JP 55167466A JP 16746680 A JP16746680 A JP 16746680A JP S5790900 A JPS5790900 A JP S5790900A
Authority
JP
Japan
Prior art keywords
ion source
neutral particle
incident device
particle incident
device ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55167466A
Other languages
Japanese (ja)
Inventor
Tadashi Satou
Hidetomo Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55167466A priority Critical patent/JPS5790900A/en
Publication of JPS5790900A publication Critical patent/JPS5790900A/en
Pending legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP55167466A 1980-11-27 1980-11-27 Neutral particle incident device ion source Pending JPS5790900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55167466A JPS5790900A (en) 1980-11-27 1980-11-27 Neutral particle incident device ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55167466A JPS5790900A (en) 1980-11-27 1980-11-27 Neutral particle incident device ion source

Publications (1)

Publication Number Publication Date
JPS5790900A true JPS5790900A (en) 1982-06-05

Family

ID=15850193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55167466A Pending JPS5790900A (en) 1980-11-27 1980-11-27 Neutral particle incident device ion source

Country Status (1)

Country Link
JP (1) JPS5790900A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288348A (en) * 1985-06-17 1986-12-18 Hitachi Ltd Ion source device
JPS62281236A (en) * 1986-05-29 1987-12-07 Hitachi Ltd Ion source
JP2011228044A (en) * 2010-04-16 2011-11-10 Nissin Ion Equipment Co Ltd Ion source and ion implanter
US9376297B2 (en) 2013-10-07 2016-06-28 Hyster-Yale Group, Inc. Reach truck

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288348A (en) * 1985-06-17 1986-12-18 Hitachi Ltd Ion source device
JPS62281236A (en) * 1986-05-29 1987-12-07 Hitachi Ltd Ion source
JP2011228044A (en) * 2010-04-16 2011-11-10 Nissin Ion Equipment Co Ltd Ion source and ion implanter
US9376297B2 (en) 2013-10-07 2016-06-28 Hyster-Yale Group, Inc. Reach truck

Similar Documents

Publication Publication Date Title
DE3380580D1 (en) Compact plug connectable ion source
GB2124824B (en) Negative ion source
JPS5787053A (en) Particle beam interrupting device
GB2091873B (en) Improvements in optical particle detectors
DE3167131D1 (en) Ion source
JPS57106000A (en) Neutral particle incident device
DE3374488D1 (en) Ion source apparatus
DE3378145D1 (en) Ion beam source
DE3270023D1 (en) Field-emission-type ion source
JPS5790900A (en) Neutral particle incident device ion source
JPS5778800A (en) Ion source for netral particle incident device
JPS5679900A (en) Ion source
JPS5663799A (en) Ion source
JPS5735A (en) Power source detector
JPS5768620A (en) Power source device
JPS57132654A (en) Gas ion source
GB8306032D0 (en) Ion source
JPS56147399A (en) Neutral particle incident device
JPS56112099A (en) Neutral particle incident device
JPS55105999A (en) Neutral particle incident device
JPS5734698A (en) High speed shutter unit for neutral particle incident device
JPS56160800A (en) Power source for neutral particle incident unit
JPS56130100A (en) Stereo detector
JPS56159099A (en) Control device for neutral particle incident unit
JPS55124999A (en) Neutral particle incident device