JPS56147399A - Neutral particle incident device - Google Patents

Neutral particle incident device

Info

Publication number
JPS56147399A
JPS56147399A JP5043280A JP5043280A JPS56147399A JP S56147399 A JPS56147399 A JP S56147399A JP 5043280 A JP5043280 A JP 5043280A JP 5043280 A JP5043280 A JP 5043280A JP S56147399 A JPS56147399 A JP S56147399A
Authority
JP
Japan
Prior art keywords
neutral particle
incident device
particle incident
neutral
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5043280A
Other languages
Japanese (ja)
Inventor
Shiyouji Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5043280A priority Critical patent/JPS56147399A/en
Publication of JPS56147399A publication Critical patent/JPS56147399A/en
Pending legal-status Critical Current

Links

JP5043280A 1980-04-18 1980-04-18 Neutral particle incident device Pending JPS56147399A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5043280A JPS56147399A (en) 1980-04-18 1980-04-18 Neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5043280A JPS56147399A (en) 1980-04-18 1980-04-18 Neutral particle incident device

Publications (1)

Publication Number Publication Date
JPS56147399A true JPS56147399A (en) 1981-11-16

Family

ID=12858700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5043280A Pending JPS56147399A (en) 1980-04-18 1980-04-18 Neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS56147399A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9551355B2 (en) 2010-07-19 2017-01-24 Ingersoll-Rand Company Diffuser using detachable vanes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9551355B2 (en) 2010-07-19 2017-01-24 Ingersoll-Rand Company Diffuser using detachable vanes

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