JPS56159100A - High speed neutral particle incident device - Google Patents

High speed neutral particle incident device

Info

Publication number
JPS56159100A
JPS56159100A JP6264080A JP6264080A JPS56159100A JP S56159100 A JPS56159100 A JP S56159100A JP 6264080 A JP6264080 A JP 6264080A JP 6264080 A JP6264080 A JP 6264080A JP S56159100 A JPS56159100 A JP S56159100A
Authority
JP
Japan
Prior art keywords
high speed
neutral particle
incident device
particle incident
speed neutral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6264080A
Other languages
Japanese (ja)
Inventor
Shigeru Ioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6264080A priority Critical patent/JPS56159100A/en
Publication of JPS56159100A publication Critical patent/JPS56159100A/en
Pending legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP6264080A 1980-05-12 1980-05-12 High speed neutral particle incident device Pending JPS56159100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6264080A JPS56159100A (en) 1980-05-12 1980-05-12 High speed neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6264080A JPS56159100A (en) 1980-05-12 1980-05-12 High speed neutral particle incident device

Publications (1)

Publication Number Publication Date
JPS56159100A true JPS56159100A (en) 1981-12-08

Family

ID=13206124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6264080A Pending JPS56159100A (en) 1980-05-12 1980-05-12 High speed neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS56159100A (en)

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