JPS5790102A - High-sensitive linear meter - Google Patents

High-sensitive linear meter

Info

Publication number
JPS5790102A
JPS5790102A JP16561880A JP16561880A JPS5790102A JP S5790102 A JPS5790102 A JP S5790102A JP 16561880 A JP16561880 A JP 16561880A JP 16561880 A JP16561880 A JP 16561880A JP S5790102 A JPS5790102 A JP S5790102A
Authority
JP
Japan
Prior art keywords
light
reference light
tilt angle
displacement
hologram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16561880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0140284B2 (enrdf_load_stackoverflow
Inventor
Joji Matsuda
Kouji Tenjinbayashi
Tsuguo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP16561880A priority Critical patent/JPS5790102A/ja
Priority to US06/322,460 priority patent/US4466693A/en
Publication of JPS5790102A publication Critical patent/JPS5790102A/ja
Publication of JPH0140284B2 publication Critical patent/JPH0140284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16561880A 1980-11-25 1980-11-25 High-sensitive linear meter Granted JPS5790102A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16561880A JPS5790102A (en) 1980-11-25 1980-11-25 High-sensitive linear meter
US06/322,460 US4466693A (en) 1980-11-25 1981-11-18 Holographic straightness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16561880A JPS5790102A (en) 1980-11-25 1980-11-25 High-sensitive linear meter

Publications (2)

Publication Number Publication Date
JPS5790102A true JPS5790102A (en) 1982-06-04
JPH0140284B2 JPH0140284B2 (enrdf_load_stackoverflow) 1989-08-28

Family

ID=15815780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16561880A Granted JPS5790102A (en) 1980-11-25 1980-11-25 High-sensitive linear meter

Country Status (1)

Country Link
JP (1) JPS5790102A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0140284B2 (enrdf_load_stackoverflow) 1989-08-28

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