JPS5785977A - Etching device - Google Patents
Etching deviceInfo
- Publication number
- JPS5785977A JPS5785977A JP16141880A JP16141880A JPS5785977A JP S5785977 A JPS5785977 A JP S5785977A JP 16141880 A JP16141880 A JP 16141880A JP 16141880 A JP16141880 A JP 16141880A JP S5785977 A JPS5785977 A JP S5785977A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- nozzle
- sprayed
- chamber
- defectives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE: To improve the yield of products and eliminate the waste of working defectives down to the final process by feeding substrates to be etched to the 2nd working chamber through etching and rinsing chambers and inspecting chambers by means of a belt conveyor.
CONSTITUTION: Substrates 5 are fed to the 1st etching chamber 1 by a belt conveyor 4, and are etched by the etching soln. sprayed from a spray nozzle 6. Thence, they are washed by the water sprayed from a spray nozzle 7. These substrates enter an inspecting chamber 2, where they are dried by gaseous N2 or the like from a nozzle 8, after which they are inspected by microscopes or ITV devices 9, 10. When a defective place is discovered, the etching soln. is sprayed from the nozzle 6 in the 2nd etching chamber 3 by button operation or the like whereby additional etching is applied. Thence, the resist is removed from the substrate by a release agent sprayed from a nozzle 11. The non-defectives are stripped of the resist as they are and are fed to the next stage. The defectives having disconnections or over-etching are recovered after the removal of the resist.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16141880A JPS5785977A (en) | 1980-11-18 | 1980-11-18 | Etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16141880A JPS5785977A (en) | 1980-11-18 | 1980-11-18 | Etching device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5785977A true JPS5785977A (en) | 1982-05-28 |
Family
ID=15734715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16141880A Pending JPS5785977A (en) | 1980-11-18 | 1980-11-18 | Etching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5785977A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0836370A1 (en) * | 1996-10-08 | 1998-04-15 | Takanori Tsubaki | Method and system for etching substrates for printed circuit boards |
-
1980
- 1980-11-18 JP JP16141880A patent/JPS5785977A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0836370A1 (en) * | 1996-10-08 | 1998-04-15 | Takanori Tsubaki | Method and system for etching substrates for printed circuit boards |
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