JPS5780731A - Detecting device for improper semiconductor - Google Patents

Detecting device for improper semiconductor

Info

Publication number
JPS5780731A
JPS5780731A JP55156712A JP15671280A JPS5780731A JP S5780731 A JPS5780731 A JP S5780731A JP 55156712 A JP55156712 A JP 55156712A JP 15671280 A JP15671280 A JP 15671280A JP S5780731 A JPS5780731 A JP S5780731A
Authority
JP
Japan
Prior art keywords
level
improper
spot
emitted
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55156712A
Other languages
English (en)
Inventor
Akira Sakagami
Toru Masaoka
Ryoichi Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55156712A priority Critical patent/JPS5780731A/ja
Publication of JPS5780731A publication Critical patent/JPS5780731A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55156712A 1980-11-07 1980-11-07 Detecting device for improper semiconductor Pending JPS5780731A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55156712A JPS5780731A (en) 1980-11-07 1980-11-07 Detecting device for improper semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55156712A JPS5780731A (en) 1980-11-07 1980-11-07 Detecting device for improper semiconductor

Publications (1)

Publication Number Publication Date
JPS5780731A true JPS5780731A (en) 1982-05-20

Family

ID=15633680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55156712A Pending JPS5780731A (en) 1980-11-07 1980-11-07 Detecting device for improper semiconductor

Country Status (1)

Country Link
JP (1) JPS5780731A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102331A (ja) * 1986-10-20 1988-05-07 Matsushita Electronics Corp 半導体集積回路の検査方法
JPS63122230A (ja) * 1986-11-12 1988-05-26 Tokyo Electron Ltd ウエハ検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102331A (ja) * 1986-10-20 1988-05-07 Matsushita Electronics Corp 半導体集積回路の検査方法
JPS63122230A (ja) * 1986-11-12 1988-05-26 Tokyo Electron Ltd ウエハ検査装置

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