JPS5780731A - Detecting device for improper semiconductor - Google Patents
Detecting device for improper semiconductorInfo
- Publication number
- JPS5780731A JPS5780731A JP55156712A JP15671280A JPS5780731A JP S5780731 A JPS5780731 A JP S5780731A JP 55156712 A JP55156712 A JP 55156712A JP 15671280 A JP15671280 A JP 15671280A JP S5780731 A JPS5780731 A JP S5780731A
- Authority
- JP
- Japan
- Prior art keywords
- level
- improper
- spot
- emitted
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55156712A JPS5780731A (en) | 1980-11-07 | 1980-11-07 | Detecting device for improper semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55156712A JPS5780731A (en) | 1980-11-07 | 1980-11-07 | Detecting device for improper semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5780731A true JPS5780731A (en) | 1982-05-20 |
Family
ID=15633680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55156712A Pending JPS5780731A (en) | 1980-11-07 | 1980-11-07 | Detecting device for improper semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5780731A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63102331A (ja) * | 1986-10-20 | 1988-05-07 | Matsushita Electronics Corp | 半導体集積回路の検査方法 |
JPS63122230A (ja) * | 1986-11-12 | 1988-05-26 | Tokyo Electron Ltd | ウエハ検査装置 |
-
1980
- 1980-11-07 JP JP55156712A patent/JPS5780731A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63102331A (ja) * | 1986-10-20 | 1988-05-07 | Matsushita Electronics Corp | 半導体集積回路の検査方法 |
JPS63122230A (ja) * | 1986-11-12 | 1988-05-26 | Tokyo Electron Ltd | ウエハ検査装置 |
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