JPS5779446A - Surface-wave probe - Google Patents
Surface-wave probeInfo
- Publication number
- JPS5779446A JPS5779446A JP15512980A JP15512980A JPS5779446A JP S5779446 A JPS5779446 A JP S5779446A JP 15512980 A JP15512980 A JP 15512980A JP 15512980 A JP15512980 A JP 15512980A JP S5779446 A JPS5779446 A JP S5779446A
- Authority
- JP
- Japan
- Prior art keywords
- wave
- elastic material
- measured
- flaw
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
PURPOSE:To lead ultrasonic-wave oscillation out of an oscillator efficiently by forming electrodes, which generate a surface acoustic wave, directly on an elastic material subtrate by vapor deposition, etc. CONSTITUTION:On the surface of an elastic material substrate 50 made of quartz, a metallic film is vapor-deposited by using a mask pattern to form comb- shaped electrode elements 51 and 52 for generating a surface acoustic wave. This probe 56 is equipped to a holder and a high-frequency signal is applied to the electrode elements 51 and 52 so that a surface wave propagates on the elastic material substrate made of quartz. Then, the surface wave travels to the reverse surface efficiently through a junction surface 55 formed on a curved surface to reach the surface of a body 59 to be measured adhered to the reverse surface. If there is a flaw, the surface wave is reflected at the flaw, so the position of the flas is found by the resulting echo. The surface wave passed through the surface to be measured, on the other hand, is absorbed by a surface-wave absorber 57. Consequantly, even an extremely this body is measured and the sensitivity of measurement is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15512980A JPS5779446A (en) | 1980-11-06 | 1980-11-06 | Surface-wave probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15512980A JPS5779446A (en) | 1980-11-06 | 1980-11-06 | Surface-wave probe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5779446A true JPS5779446A (en) | 1982-05-18 |
Family
ID=15599183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15512980A Pending JPS5779446A (en) | 1980-11-06 | 1980-11-06 | Surface-wave probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5779446A (en) |
-
1980
- 1980-11-06 JP JP15512980A patent/JPS5779446A/en active Pending
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