JPS5779446A - Surface-wave probe - Google Patents

Surface-wave probe

Info

Publication number
JPS5779446A
JPS5779446A JP15512980A JP15512980A JPS5779446A JP S5779446 A JPS5779446 A JP S5779446A JP 15512980 A JP15512980 A JP 15512980A JP 15512980 A JP15512980 A JP 15512980A JP S5779446 A JPS5779446 A JP S5779446A
Authority
JP
Japan
Prior art keywords
wave
elastic material
measured
flaw
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15512980A
Other languages
Japanese (ja)
Inventor
Hisashi Hirai
Toshiaki Oitate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15512980A priority Critical patent/JPS5779446A/en
Publication of JPS5779446A publication Critical patent/JPS5779446A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0423Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To lead ultrasonic-wave oscillation out of an oscillator efficiently by forming electrodes, which generate a surface acoustic wave, directly on an elastic material subtrate by vapor deposition, etc. CONSTITUTION:On the surface of an elastic material substrate 50 made of quartz, a metallic film is vapor-deposited by using a mask pattern to form comb- shaped electrode elements 51 and 52 for generating a surface acoustic wave. This probe 56 is equipped to a holder and a high-frequency signal is applied to the electrode elements 51 and 52 so that a surface wave propagates on the elastic material substrate made of quartz. Then, the surface wave travels to the reverse surface efficiently through a junction surface 55 formed on a curved surface to reach the surface of a body 59 to be measured adhered to the reverse surface. If there is a flaw, the surface wave is reflected at the flaw, so the position of the flas is found by the resulting echo. The surface wave passed through the surface to be measured, on the other hand, is absorbed by a surface-wave absorber 57. Consequantly, even an extremely this body is measured and the sensitivity of measurement is improved.
JP15512980A 1980-11-06 1980-11-06 Surface-wave probe Pending JPS5779446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15512980A JPS5779446A (en) 1980-11-06 1980-11-06 Surface-wave probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15512980A JPS5779446A (en) 1980-11-06 1980-11-06 Surface-wave probe

Publications (1)

Publication Number Publication Date
JPS5779446A true JPS5779446A (en) 1982-05-18

Family

ID=15599183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15512980A Pending JPS5779446A (en) 1980-11-06 1980-11-06 Surface-wave probe

Country Status (1)

Country Link
JP (1) JPS5779446A (en)

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