JPS55166006A - Measuring method of film thickness - Google Patents

Measuring method of film thickness

Info

Publication number
JPS55166006A
JPS55166006A JP7439179A JP7439179A JPS55166006A JP S55166006 A JPS55166006 A JP S55166006A JP 7439179 A JP7439179 A JP 7439179A JP 7439179 A JP7439179 A JP 7439179A JP S55166006 A JPS55166006 A JP S55166006A
Authority
JP
Japan
Prior art keywords
layer
measured
absorbing layer
modulated
electromagnetic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7439179A
Other languages
Japanese (ja)
Other versions
JPS601562B2 (en
Inventor
Hitoshi Ogata
Tatsuo Masumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7439179A priority Critical patent/JPS601562B2/en
Publication of JPS55166006A publication Critical patent/JPS55166006A/en
Publication of JPS601562B2 publication Critical patent/JPS601562B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Abstract

PURPOSE: To enable contactless measurement by a method wherein modulated electromagnetic wave is projected on a sample consisting of a layer to be measured and an absorbing layer, the amplitude of generated pressure wave is measured by changing the modulated frequency, then the thickness of the layer is obtained from the ratio of two amplitudes.
CONSTITUTION: When modulated electromagnetic wave 61 is projected on a sample 1, the electromagnetic wave is absorbed by an absorbing layer 1b, and its energy is converted in the absorbing layer 1b into thermal energy, and results in periodic temperature changes of the absorbing layer 1b. Because the absorbing layer 1b is in contact with a layer to be measured 1a, the surface temperature of the layer to be measured 1a at the side of the absorbing layer 1b changes in the same frequency and in the same phase. This temperature oscillation transmits within the layer to be measured 1a, heats background gas at the surface of the opposite side, and generates pressure wave in a sealed container 2. The amplitude of this pressure wave is measured by a microphone 5. Then, the layer thickness is calculated from sound pressure Q1, Q2 at two proper modulated angular frequency ω1, ω2, using the predetermined formula.
COPYRIGHT: (C)1980,JPO&Japio
JP7439179A 1979-06-12 1979-06-12 Film thickness measurement method Expired JPS601562B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7439179A JPS601562B2 (en) 1979-06-12 1979-06-12 Film thickness measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7439179A JPS601562B2 (en) 1979-06-12 1979-06-12 Film thickness measurement method

Publications (2)

Publication Number Publication Date
JPS55166006A true JPS55166006A (en) 1980-12-24
JPS601562B2 JPS601562B2 (en) 1985-01-16

Family

ID=13545825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7439179A Expired JPS601562B2 (en) 1979-06-12 1979-06-12 Film thickness measurement method

Country Status (1)

Country Link
JP (1) JPS601562B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0545234U (en) * 1991-11-15 1993-06-18 株式会社ユニシアジエツクス Bearing structure

Also Published As

Publication number Publication date
JPS601562B2 (en) 1985-01-16

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