JPS55166006A - Measuring method of film thickness - Google Patents
Measuring method of film thicknessInfo
- Publication number
- JPS55166006A JPS55166006A JP7439179A JP7439179A JPS55166006A JP S55166006 A JPS55166006 A JP S55166006A JP 7439179 A JP7439179 A JP 7439179A JP 7439179 A JP7439179 A JP 7439179A JP S55166006 A JPS55166006 A JP S55166006A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- measured
- absorbing layer
- modulated
- electromagnetic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Abstract
PURPOSE: To enable contactless measurement by a method wherein modulated electromagnetic wave is projected on a sample consisting of a layer to be measured and an absorbing layer, the amplitude of generated pressure wave is measured by changing the modulated frequency, then the thickness of the layer is obtained from the ratio of two amplitudes.
CONSTITUTION: When modulated electromagnetic wave 61 is projected on a sample 1, the electromagnetic wave is absorbed by an absorbing layer 1b, and its energy is converted in the absorbing layer 1b into thermal energy, and results in periodic temperature changes of the absorbing layer 1b. Because the absorbing layer 1b is in contact with a layer to be measured 1a, the surface temperature of the layer to be measured 1a at the side of the absorbing layer 1b changes in the same frequency and in the same phase. This temperature oscillation transmits within the layer to be measured 1a, heats background gas at the surface of the opposite side, and generates pressure wave in a sealed container 2. The amplitude of this pressure wave is measured by a microphone 5. Then, the layer thickness is calculated from sound pressure Q1, Q2 at two proper modulated angular frequency ω1, ω2, using the predetermined formula.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7439179A JPS601562B2 (en) | 1979-06-12 | 1979-06-12 | Film thickness measurement method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7439179A JPS601562B2 (en) | 1979-06-12 | 1979-06-12 | Film thickness measurement method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55166006A true JPS55166006A (en) | 1980-12-24 |
JPS601562B2 JPS601562B2 (en) | 1985-01-16 |
Family
ID=13545825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7439179A Expired JPS601562B2 (en) | 1979-06-12 | 1979-06-12 | Film thickness measurement method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS601562B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0545234U (en) * | 1991-11-15 | 1993-06-18 | 株式会社ユニシアジエツクス | Bearing structure |
-
1979
- 1979-06-12 JP JP7439179A patent/JPS601562B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS601562B2 (en) | 1985-01-16 |
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