JPS5778800A - Ion source for netral particle incident device - Google Patents

Ion source for netral particle incident device

Info

Publication number
JPS5778800A
JPS5778800A JP55153881A JP15388180A JPS5778800A JP S5778800 A JPS5778800 A JP S5778800A JP 55153881 A JP55153881 A JP 55153881A JP 15388180 A JP15388180 A JP 15388180A JP S5778800 A JPS5778800 A JP S5778800A
Authority
JP
Japan
Prior art keywords
netral
ion source
incident device
particle incident
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55153881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255260B2 (enrdf_load_stackoverflow
Inventor
Shinya Sekimoto
Shiyouji Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55153881A priority Critical patent/JPS5778800A/ja
Publication of JPS5778800A publication Critical patent/JPS5778800A/ja
Publication of JPS6255260B2 publication Critical patent/JPS6255260B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP55153881A 1980-11-04 1980-11-04 Ion source for netral particle incident device Granted JPS5778800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55153881A JPS5778800A (en) 1980-11-04 1980-11-04 Ion source for netral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55153881A JPS5778800A (en) 1980-11-04 1980-11-04 Ion source for netral particle incident device

Publications (2)

Publication Number Publication Date
JPS5778800A true JPS5778800A (en) 1982-05-17
JPS6255260B2 JPS6255260B2 (enrdf_load_stackoverflow) 1987-11-19

Family

ID=15572142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55153881A Granted JPS5778800A (en) 1980-11-04 1980-11-04 Ion source for netral particle incident device

Country Status (1)

Country Link
JP (1) JPS5778800A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195550A (ja) * 1985-02-25 1986-08-29 Hitachi Ltd イオン源

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6423753U (enrdf_load_stackoverflow) * 1987-07-30 1989-02-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121252A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Lead-out electrode construction for ion source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121252A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Lead-out electrode construction for ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195550A (ja) * 1985-02-25 1986-08-29 Hitachi Ltd イオン源

Also Published As

Publication number Publication date
JPS6255260B2 (enrdf_load_stackoverflow) 1987-11-19

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