JPS56101599A - Projector window device for charged particle projector - Google Patents
Projector window device for charged particle projectorInfo
- Publication number
- JPS56101599A JPS56101599A JP502080A JP502080A JPS56101599A JP S56101599 A JPS56101599 A JP S56101599A JP 502080 A JP502080 A JP 502080A JP 502080 A JP502080 A JP 502080A JP S56101599 A JPS56101599 A JP S56101599A
- Authority
- JP
- Japan
- Prior art keywords
- projector
- charged particle
- window device
- projector window
- particle projector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP502080A JPS56101599A (en) | 1980-01-18 | 1980-01-18 | Projector window device for charged particle projector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP502080A JPS56101599A (en) | 1980-01-18 | 1980-01-18 | Projector window device for charged particle projector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56101599A true JPS56101599A (en) | 1981-08-14 |
Family
ID=11599824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP502080A Pending JPS56101599A (en) | 1980-01-18 | 1980-01-18 | Projector window device for charged particle projector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56101599A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007125119A (en) * | 2005-11-01 | 2007-05-24 | Mitsubishi Heavy Ind Ltd | Electron beam sterilizer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237554A (en) * | 1975-09-20 | 1977-03-23 | Ebara Corp | Irradiation method of exhaust gas with electron beam |
-
1980
- 1980-01-18 JP JP502080A patent/JPS56101599A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237554A (en) * | 1975-09-20 | 1977-03-23 | Ebara Corp | Irradiation method of exhaust gas with electron beam |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007125119A (en) * | 2005-11-01 | 2007-05-24 | Mitsubishi Heavy Ind Ltd | Electron beam sterilizer |
JP4727389B2 (en) * | 2005-11-01 | 2011-07-20 | 三菱重工業株式会社 | Electron beam sterilizer |
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