JPS56101599A - Projector window device for charged particle projector - Google Patents

Projector window device for charged particle projector

Info

Publication number
JPS56101599A
JPS56101599A JP502080A JP502080A JPS56101599A JP S56101599 A JPS56101599 A JP S56101599A JP 502080 A JP502080 A JP 502080A JP 502080 A JP502080 A JP 502080A JP S56101599 A JPS56101599 A JP S56101599A
Authority
JP
Japan
Prior art keywords
projector
charged particle
window device
projector window
particle projector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP502080A
Other languages
Japanese (ja)
Inventor
Hisakazu Shiba
Kazutoshi Fujita
Kenichi Mizusawa
Toshio Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Nissin High Voltage Co Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd, Nissin High Voltage Co Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP502080A priority Critical patent/JPS56101599A/en
Publication of JPS56101599A publication Critical patent/JPS56101599A/en
Pending legal-status Critical Current

Links

JP502080A 1980-01-18 1980-01-18 Projector window device for charged particle projector Pending JPS56101599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP502080A JPS56101599A (en) 1980-01-18 1980-01-18 Projector window device for charged particle projector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP502080A JPS56101599A (en) 1980-01-18 1980-01-18 Projector window device for charged particle projector

Publications (1)

Publication Number Publication Date
JPS56101599A true JPS56101599A (en) 1981-08-14

Family

ID=11599824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP502080A Pending JPS56101599A (en) 1980-01-18 1980-01-18 Projector window device for charged particle projector

Country Status (1)

Country Link
JP (1) JPS56101599A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007125119A (en) * 2005-11-01 2007-05-24 Mitsubishi Heavy Ind Ltd Electron beam sterilizer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237554A (en) * 1975-09-20 1977-03-23 Ebara Corp Irradiation method of exhaust gas with electron beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237554A (en) * 1975-09-20 1977-03-23 Ebara Corp Irradiation method of exhaust gas with electron beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007125119A (en) * 2005-11-01 2007-05-24 Mitsubishi Heavy Ind Ltd Electron beam sterilizer
JP4727389B2 (en) * 2005-11-01 2011-07-20 三菱重工業株式会社 Electron beam sterilizer

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