JPS5778757A - Field discharge type electron gun - Google Patents

Field discharge type electron gun

Info

Publication number
JPS5778757A
JPS5778757A JP55153622A JP15362280A JPS5778757A JP S5778757 A JPS5778757 A JP S5778757A JP 55153622 A JP55153622 A JP 55153622A JP 15362280 A JP15362280 A JP 15362280A JP S5778757 A JPS5778757 A JP S5778757A
Authority
JP
Japan
Prior art keywords
emitter
power source
control electrode
contamination
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55153622A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211451B2 (enrdf_load_stackoverflow
Inventor
Shuichi Saito
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55153622A priority Critical patent/JPS5778757A/ja
Publication of JPS5778757A publication Critical patent/JPS5778757A/ja
Publication of JPS6211451B2 publication Critical patent/JPS6211451B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP55153622A 1980-10-31 1980-10-31 Field discharge type electron gun Granted JPS5778757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55153622A JPS5778757A (en) 1980-10-31 1980-10-31 Field discharge type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55153622A JPS5778757A (en) 1980-10-31 1980-10-31 Field discharge type electron gun

Publications (2)

Publication Number Publication Date
JPS5778757A true JPS5778757A (en) 1982-05-17
JPS6211451B2 JPS6211451B2 (enrdf_load_stackoverflow) 1987-03-12

Family

ID=15566509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55153622A Granted JPS5778757A (en) 1980-10-31 1980-10-31 Field discharge type electron gun

Country Status (1)

Country Link
JP (1) JPS5778757A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6211451B2 (enrdf_load_stackoverflow) 1987-03-12

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