JPS57197737A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS57197737A
JPS57197737A JP8346981A JP8346981A JPS57197737A JP S57197737 A JPS57197737 A JP S57197737A JP 8346981 A JP8346981 A JP 8346981A JP 8346981 A JP8346981 A JP 8346981A JP S57197737 A JPS57197737 A JP S57197737A
Authority
JP
Japan
Prior art keywords
bias voltage
cathode
electron gun
vwc
beam current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8346981A
Other languages
Japanese (ja)
Other versions
JPH0353741B2 (en
Inventor
Isao Sasaki
Tadahiro Takigawa
Kakuki Motoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8346981A priority Critical patent/JPS57197737A/en
Publication of JPS57197737A publication Critical patent/JPS57197737A/en
Publication of JPH0353741B2 publication Critical patent/JPH0353741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To provide possibility for setting of the bias voltage, which can give the maximum brightness easily, by sensing the total beam current emitted from the cathode and the bias voltage between the cathode and Wehnelt electrode and by determining the amplification constant by the use of a specific equation. CONSTITUTION:The total beam current It emitted from the cathode 2 of an electron gun 1 is sensed by a sensor 13 while the bias voltage Vw between the cathode 2 and Wehnelt electrode 4 by another sensor 14, and they are fed into a CPU 15. A calculation shall be made so as to satisfy mu=Va [(It/G)<2/3>-Vw]and Vwc=-Va/mu, where Va represents accelerating voltage of anode 5, G the perviance, mu the amplification constant, and Vwc the cut-off bias voltage, in order to make a variable control of the bias resistance 7, and then a setting shall be made so that the bias voltage Vw gives maximum brightness. Accordingly, the electron gun 1 can be used always in the optimum operating condition, which assures a much prolonged life.
JP8346981A 1981-05-30 1981-05-30 Electron gun Granted JPS57197737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8346981A JPS57197737A (en) 1981-05-30 1981-05-30 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8346981A JPS57197737A (en) 1981-05-30 1981-05-30 Electron gun

Publications (2)

Publication Number Publication Date
JPS57197737A true JPS57197737A (en) 1982-12-04
JPH0353741B2 JPH0353741B2 (en) 1991-08-16

Family

ID=13803323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8346981A Granted JPS57197737A (en) 1981-05-30 1981-05-30 Electron gun

Country Status (1)

Country Link
JP (1) JPS57197737A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04253149A (en) * 1990-08-29 1992-09-08 Nissin Electric Co Ltd Ion radiating device with two-dimensional magnetic scanning and related device
WO2002084696A1 (en) * 2001-04-13 2002-10-24 Advantest Corporation Electron beam generator and electron beam aligner

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04253149A (en) * 1990-08-29 1992-09-08 Nissin Electric Co Ltd Ion radiating device with two-dimensional magnetic scanning and related device
WO2002084696A1 (en) * 2001-04-13 2002-10-24 Advantest Corporation Electron beam generator and electron beam aligner

Also Published As

Publication number Publication date
JPH0353741B2 (en) 1991-08-16

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