JPS5583141A - Control method of cathode heating current of hot-cathode electron gun - Google Patents

Control method of cathode heating current of hot-cathode electron gun

Info

Publication number
JPS5583141A
JPS5583141A JP15730578A JP15730578A JPS5583141A JP S5583141 A JPS5583141 A JP S5583141A JP 15730578 A JP15730578 A JP 15730578A JP 15730578 A JP15730578 A JP 15730578A JP S5583141 A JPS5583141 A JP S5583141A
Authority
JP
Japan
Prior art keywords
cathode
control circuit
current
electron gun
beam current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15730578A
Other languages
Japanese (ja)
Inventor
Yoshinori Ikeda
Hideaki Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15730578A priority Critical patent/JPS5583141A/en
Publication of JPS5583141A publication Critical patent/JPS5583141A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To stabilize the electron beam emitted from electron gun and to lengthen the service life of cathode, by supplying the beam current measured by capacitor throtle to control circuit as input signal and operating the control circuit such that the beam current is constant.
CONSTITUTION: Cathode current is set by cathode current control circuit 26 then the magnitude of beam current is fed back from capacitor throtle 28 to cathode current heating control circuit 25 to operate said control circuit such that the magnitude of beam current is constant. The magnitude of electron beam current is maintained constant even when the thining due to the disperse of cathode occurred, thereby the electorn beam is stabilized and the overheat of cathode is prevented resulting in the lengthening of service life of cathode.
COPYRIGHT: (C)1980,JPO&Japio
JP15730578A 1978-12-19 1978-12-19 Control method of cathode heating current of hot-cathode electron gun Pending JPS5583141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15730578A JPS5583141A (en) 1978-12-19 1978-12-19 Control method of cathode heating current of hot-cathode electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15730578A JPS5583141A (en) 1978-12-19 1978-12-19 Control method of cathode heating current of hot-cathode electron gun

Publications (1)

Publication Number Publication Date
JPS5583141A true JPS5583141A (en) 1980-06-23

Family

ID=15646752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15730578A Pending JPS5583141A (en) 1978-12-19 1978-12-19 Control method of cathode heating current of hot-cathode electron gun

Country Status (1)

Country Link
JP (1) JPS5583141A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272439A (en) * 1986-05-20 1987-11-26 Canon Inc Electron emitting device
JP2009010078A (en) * 2007-06-27 2009-01-15 Nuflare Technology Inc Electron beam drawing device and current density adjustment method for electron beam
JP2010182466A (en) * 2009-02-04 2010-08-19 Jeol Ltd Automatic incident axis aligning method for cold cathode electron gun

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140982A (en) * 1974-10-02 1976-04-06 Nippon Electron Optics Lab Denshipuroobusochi niokeru biimuanteikasochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140982A (en) * 1974-10-02 1976-04-06 Nippon Electron Optics Lab Denshipuroobusochi niokeru biimuanteikasochi

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272439A (en) * 1986-05-20 1987-11-26 Canon Inc Electron emitting device
JP2009010078A (en) * 2007-06-27 2009-01-15 Nuflare Technology Inc Electron beam drawing device and current density adjustment method for electron beam
JP4676461B2 (en) * 2007-06-27 2011-04-27 株式会社ニューフレアテクノロジー Electron beam drawing apparatus and electron beam current density adjusting method
JP2010182466A (en) * 2009-02-04 2010-08-19 Jeol Ltd Automatic incident axis aligning method for cold cathode electron gun

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