JPS5583141A - Control method of cathode heating current of hot-cathode electron gun - Google Patents
Control method of cathode heating current of hot-cathode electron gunInfo
- Publication number
- JPS5583141A JPS5583141A JP15730578A JP15730578A JPS5583141A JP S5583141 A JPS5583141 A JP S5583141A JP 15730578 A JP15730578 A JP 15730578A JP 15730578 A JP15730578 A JP 15730578A JP S5583141 A JPS5583141 A JP S5583141A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- control circuit
- current
- electron gun
- beam current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Solid Thermionic Cathode (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To stabilize the electron beam emitted from electron gun and to lengthen the service life of cathode, by supplying the beam current measured by capacitor throtle to control circuit as input signal and operating the control circuit such that the beam current is constant.
CONSTITUTION: Cathode current is set by cathode current control circuit 26 then the magnitude of beam current is fed back from capacitor throtle 28 to cathode current heating control circuit 25 to operate said control circuit such that the magnitude of beam current is constant. The magnitude of electron beam current is maintained constant even when the thining due to the disperse of cathode occurred, thereby the electorn beam is stabilized and the overheat of cathode is prevented resulting in the lengthening of service life of cathode.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15730578A JPS5583141A (en) | 1978-12-19 | 1978-12-19 | Control method of cathode heating current of hot-cathode electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15730578A JPS5583141A (en) | 1978-12-19 | 1978-12-19 | Control method of cathode heating current of hot-cathode electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5583141A true JPS5583141A (en) | 1980-06-23 |
Family
ID=15646752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15730578A Pending JPS5583141A (en) | 1978-12-19 | 1978-12-19 | Control method of cathode heating current of hot-cathode electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5583141A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62272439A (en) * | 1986-05-20 | 1987-11-26 | Canon Inc | Electron emitting device |
JP2009010078A (en) * | 2007-06-27 | 2009-01-15 | Nuflare Technology Inc | Electron beam drawing device and current density adjustment method for electron beam |
JP2010182466A (en) * | 2009-02-04 | 2010-08-19 | Jeol Ltd | Automatic incident axis aligning method for cold cathode electron gun |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5140982A (en) * | 1974-10-02 | 1976-04-06 | Nippon Electron Optics Lab | Denshipuroobusochi niokeru biimuanteikasochi |
-
1978
- 1978-12-19 JP JP15730578A patent/JPS5583141A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5140982A (en) * | 1974-10-02 | 1976-04-06 | Nippon Electron Optics Lab | Denshipuroobusochi niokeru biimuanteikasochi |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62272439A (en) * | 1986-05-20 | 1987-11-26 | Canon Inc | Electron emitting device |
JP2009010078A (en) * | 2007-06-27 | 2009-01-15 | Nuflare Technology Inc | Electron beam drawing device and current density adjustment method for electron beam |
JP4676461B2 (en) * | 2007-06-27 | 2011-04-27 | 株式会社ニューフレアテクノロジー | Electron beam drawing apparatus and electron beam current density adjusting method |
JP2010182466A (en) * | 2009-02-04 | 2010-08-19 | Jeol Ltd | Automatic incident axis aligning method for cold cathode electron gun |
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