JPS5776739A - Electron/ion source - Google Patents

Electron/ion source

Info

Publication number
JPS5776739A
JPS5776739A JP55152153A JP15215380A JPS5776739A JP S5776739 A JPS5776739 A JP S5776739A JP 55152153 A JP55152153 A JP 55152153A JP 15215380 A JP15215380 A JP 15215380A JP S5776739 A JPS5776739 A JP S5776739A
Authority
JP
Japan
Prior art keywords
electron
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55152153A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637423B2 (pm
Inventor
Efuimoobitsuchi Kureind Yuurii
Arekuseebitsuchi Gu Urajimiiru
Iwanoobitsuchi Beruyuu Serugei
Washiriiebitsuchi Gabu Serugei
Petoroobitsuchi Koo Urajimiiru
Fuedoroobitsuchi Dey Anatoorii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP55152153A priority Critical patent/JPS5776739A/ja
Publication of JPS5776739A publication Critical patent/JPS5776739A/ja
Publication of JPS637423B2 publication Critical patent/JPS637423B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP55152153A 1980-10-31 1980-10-31 Electron/ion source Granted JPS5776739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55152153A JPS5776739A (en) 1980-10-31 1980-10-31 Electron/ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55152153A JPS5776739A (en) 1980-10-31 1980-10-31 Electron/ion source

Publications (2)

Publication Number Publication Date
JPS5776739A true JPS5776739A (en) 1982-05-13
JPS637423B2 JPS637423B2 (pm) 1988-02-16

Family

ID=15534176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55152153A Granted JPS5776739A (en) 1980-10-31 1980-10-31 Electron/ion source

Country Status (1)

Country Link
JP (1) JPS5776739A (pm)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021528815A (ja) * 2018-06-20 2021-10-21 ボード オブ トラスティーズ オブ ミシガン ステート ユニバーシティ 単一ビームプラズマ源

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514496A (pm) * 1974-05-27 1976-01-14 Philips Nv

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514496A (pm) * 1974-05-27 1976-01-14 Philips Nv

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021528815A (ja) * 2018-06-20 2021-10-21 ボード オブ トラスティーズ オブ ミシガン ステート ユニバーシティ 単一ビームプラズマ源

Also Published As

Publication number Publication date
JPS637423B2 (pm) 1988-02-16

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