JPS577136A - Inspection of semiconductor device - Google Patents

Inspection of semiconductor device

Info

Publication number
JPS577136A
JPS577136A JP8192780A JP8192780A JPS577136A JP S577136 A JPS577136 A JP S577136A JP 8192780 A JP8192780 A JP 8192780A JP 8192780 A JP8192780 A JP 8192780A JP S577136 A JPS577136 A JP S577136A
Authority
JP
Japan
Prior art keywords
inspection
chips
wafer
concentration section
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8192780A
Other languages
English (en)
Inventor
Hiroshi Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8192780A priority Critical patent/JPS577136A/ja
Publication of JPS577136A publication Critical patent/JPS577136A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP8192780A 1980-06-16 1980-06-16 Inspection of semiconductor device Pending JPS577136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8192780A JPS577136A (en) 1980-06-16 1980-06-16 Inspection of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8192780A JPS577136A (en) 1980-06-16 1980-06-16 Inspection of semiconductor device

Publications (1)

Publication Number Publication Date
JPS577136A true JPS577136A (en) 1982-01-14

Family

ID=13760088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8192780A Pending JPS577136A (en) 1980-06-16 1980-06-16 Inspection of semiconductor device

Country Status (1)

Country Link
JP (1) JPS577136A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861639A (ja) * 1981-10-08 1983-04-12 Toshiba Corp 半導体装置
US5130644A (en) * 1988-11-23 1992-07-14 Texas Instruments Incorporated Integrated circuit self-testing device and method
US5862147A (en) * 1996-04-22 1999-01-19 Nec Corporation Semiconductor device on semiconductor wafer having simple wirings for test and capable of being tested in a short time
JP2009152219A (ja) * 2003-10-28 2009-07-09 Nec Schott Components Corp 感温ペレット型温度ヒューズおよび感温ペレットの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861639A (ja) * 1981-10-08 1983-04-12 Toshiba Corp 半導体装置
US5130644A (en) * 1988-11-23 1992-07-14 Texas Instruments Incorporated Integrated circuit self-testing device and method
US5862147A (en) * 1996-04-22 1999-01-19 Nec Corporation Semiconductor device on semiconductor wafer having simple wirings for test and capable of being tested in a short time
JP2009152219A (ja) * 2003-10-28 2009-07-09 Nec Schott Components Corp 感温ペレット型温度ヒューズおよび感温ペレットの製造方法

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