JPS577128A - Coating method for resin film - Google Patents

Coating method for resin film

Info

Publication number
JPS577128A
JPS577128A JP8122580A JP8122580A JPS577128A JP S577128 A JPS577128 A JP S577128A JP 8122580 A JP8122580 A JP 8122580A JP 8122580 A JP8122580 A JP 8122580A JP S577128 A JPS577128 A JP S577128A
Authority
JP
Japan
Prior art keywords
resin
substrate
resin film
disk
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8122580A
Other languages
English (en)
Inventor
Ichiro Fujita
Toshihiko Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8122580A priority Critical patent/JPS577128A/ja
Publication of JPS577128A publication Critical patent/JPS577128A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P14/6922—
    • H10P14/6342—
    • H10P14/6686—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP8122580A 1980-06-16 1980-06-16 Coating method for resin film Pending JPS577128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8122580A JPS577128A (en) 1980-06-16 1980-06-16 Coating method for resin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8122580A JPS577128A (en) 1980-06-16 1980-06-16 Coating method for resin film

Publications (1)

Publication Number Publication Date
JPS577128A true JPS577128A (en) 1982-01-14

Family

ID=13740528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8122580A Pending JPS577128A (en) 1980-06-16 1980-06-16 Coating method for resin film

Country Status (1)

Country Link
JP (1) JPS577128A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235648A (ja) * 1985-08-09 1987-02-16 Nec Corp 多層配線の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235648A (ja) * 1985-08-09 1987-02-16 Nec Corp 多層配線の形成方法

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