JPS577121A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS577121A JPS577121A JP8203280A JP8203280A JPS577121A JP S577121 A JPS577121 A JP S577121A JP 8203280 A JP8203280 A JP 8203280A JP 8203280 A JP8203280 A JP 8203280A JP S577121 A JPS577121 A JP S577121A
- Authority
- JP
- Japan
- Prior art keywords
- film
- mask
- injected
- layer
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
Landscapes
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8203280A JPS577121A (en) | 1980-06-17 | 1980-06-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8203280A JPS577121A (en) | 1980-06-17 | 1980-06-17 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS577121A true JPS577121A (en) | 1982-01-14 |
JPS6258529B2 JPS6258529B2 (enrdf_load_stackoverflow) | 1987-12-07 |
Family
ID=13763179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8203280A Granted JPS577121A (en) | 1980-06-17 | 1980-06-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS577121A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63114121A (ja) * | 1986-07-07 | 1988-05-19 | Nec Corp | 半導体装置の製造方法 |
US4761423A (en) * | 1984-01-06 | 1988-08-02 | Chinoin Gyogyszer Es Vegyeszeti Termekek Gyara Rt. | Seed dressing additive |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5343473A (en) * | 1976-09-30 | 1978-04-19 | Nec Corp | Impurity driving-in method |
-
1980
- 1980-06-17 JP JP8203280A patent/JPS577121A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5343473A (en) * | 1976-09-30 | 1978-04-19 | Nec Corp | Impurity driving-in method |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4761423A (en) * | 1984-01-06 | 1988-08-02 | Chinoin Gyogyszer Es Vegyeszeti Termekek Gyara Rt. | Seed dressing additive |
JPS63114121A (ja) * | 1986-07-07 | 1988-05-19 | Nec Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6258529B2 (enrdf_load_stackoverflow) | 1987-12-07 |
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