JPS5769781A - Semiconductor pressure-sensitive element - Google Patents

Semiconductor pressure-sensitive element

Info

Publication number
JPS5769781A
JPS5769781A JP14516880A JP14516880A JPS5769781A JP S5769781 A JPS5769781 A JP S5769781A JP 14516880 A JP14516880 A JP 14516880A JP 14516880 A JP14516880 A JP 14516880A JP S5769781 A JPS5769781 A JP S5769781A
Authority
JP
Japan
Prior art keywords
sensitive element
semiconductor pressure
substrate
semiconductor
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14516880A
Other languages
Japanese (ja)
Inventor
Koichi Kugimiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14516880A priority Critical patent/JPS5769781A/en
Publication of JPS5769781A publication Critical patent/JPS5769781A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Abstract

PURPOSE:To prevent deterioration of a semiconductor pressure-sensitive element and to enhance reliability thereof by a method wherein the stress concentrating part of a semiconductor substrate to be made to come in contact with a medium to be detected is covered with a protective film. CONSTITUTION:A concave 12 is provided in the semiconductor substrate 11 to form a thin layer part 13, and the protective film 17 of Si3N4 film, etc., is provided on the surface. The stress concentrating part 14 is protected therewith, and the substrate is adhered to a holding substrate 16. Accordingly deterioration of the semiconductor pressure-sensitive element can be prevented, and reliability thereof can be enhanced sharply.
JP14516880A 1980-10-16 1980-10-16 Semiconductor pressure-sensitive element Pending JPS5769781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14516880A JPS5769781A (en) 1980-10-16 1980-10-16 Semiconductor pressure-sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14516880A JPS5769781A (en) 1980-10-16 1980-10-16 Semiconductor pressure-sensitive element

Publications (1)

Publication Number Publication Date
JPS5769781A true JPS5769781A (en) 1982-04-28

Family

ID=15378996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14516880A Pending JPS5769781A (en) 1980-10-16 1980-10-16 Semiconductor pressure-sensitive element

Country Status (1)

Country Link
JP (1) JPS5769781A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038905A (en) * 2008-07-10 2010-02-18 Denso Corp Sensor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038905A (en) * 2008-07-10 2010-02-18 Denso Corp Sensor device
US8006553B2 (en) 2008-07-10 2011-08-30 Denso Corporation Semiconductor sensor having heater on insulation film and manufacturing method of the same

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