JPS5766860A - Abrasive liquid selector device - Google Patents

Abrasive liquid selector device

Info

Publication number
JPS5766860A
JPS5766860A JP55142510A JP14251080A JPS5766860A JP S5766860 A JPS5766860 A JP S5766860A JP 55142510 A JP55142510 A JP 55142510A JP 14251080 A JP14251080 A JP 14251080A JP S5766860 A JPS5766860 A JP S5766860A
Authority
JP
Japan
Prior art keywords
lapping
discharge
lapping liquid
liquid
surface plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55142510A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238349B2 (enrdf_load_stackoverflow
Inventor
Hatsuyuki Arai
Seiichi Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Original Assignee
SUPIIDE FUAMU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK filed Critical SUPIIDE FUAMU KK
Priority to JP55142510A priority Critical patent/JPS5766860A/ja
Publication of JPS5766860A publication Critical patent/JPS5766860A/ja
Publication of JPH0238349B2 publication Critical patent/JPH0238349B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP55142510A 1980-10-14 1980-10-14 Abrasive liquid selector device Granted JPS5766860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55142510A JPS5766860A (en) 1980-10-14 1980-10-14 Abrasive liquid selector device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55142510A JPS5766860A (en) 1980-10-14 1980-10-14 Abrasive liquid selector device

Publications (2)

Publication Number Publication Date
JPS5766860A true JPS5766860A (en) 1982-04-23
JPH0238349B2 JPH0238349B2 (enrdf_load_stackoverflow) 1990-08-30

Family

ID=15317023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55142510A Granted JPS5766860A (en) 1980-10-14 1980-10-14 Abrasive liquid selector device

Country Status (1)

Country Link
JP (1) JPS5766860A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190867A (ja) * 1984-10-05 1986-05-09 Naoetsu Denshi Kogyo Kk ウェーハの研磨方法
JP2007189258A (ja) * 2007-04-16 2007-07-26 Ebara Corp ポリッシング装置
JP2020011329A (ja) * 2018-07-17 2020-01-23 スピードファム株式会社 処理液切換装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457294A (en) * 1977-10-15 1979-05-08 Shibayama Kikai Kk Method of separating slurry wash liquid in polishing machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457294A (en) * 1977-10-15 1979-05-08 Shibayama Kikai Kk Method of separating slurry wash liquid in polishing machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190867A (ja) * 1984-10-05 1986-05-09 Naoetsu Denshi Kogyo Kk ウェーハの研磨方法
JP2007189258A (ja) * 2007-04-16 2007-07-26 Ebara Corp ポリッシング装置
JP2020011329A (ja) * 2018-07-17 2020-01-23 スピードファム株式会社 処理液切換装置
KR20200008948A (ko) 2018-07-17 2020-01-29 스피드팸 가부시키가이샤 처리액 전환 장치
TWI781325B (zh) * 2018-07-17 2022-10-21 日商創技股份有限公司 處理液切換裝置

Also Published As

Publication number Publication date
JPH0238349B2 (enrdf_load_stackoverflow) 1990-08-30

Similar Documents

Publication Publication Date Title
JPS6470136A (en) Apparatus for continuously manufacturing liquefied mixture of solid and liquid materials
CN114800095B (zh) 一种用于手机盖板加工的打磨抛亮装置
JPS5766860A (en) Abrasive liquid selector device
US3616820A (en) Softener valve
US3606091A (en) Multi-pressure liquid dispenser system
CN111039439B (zh) 一种生活污水处理设备
CN208322918U (zh) 用于船舶的甲板养护装置
US1382633A (en) Cleaning device
CN109824177A (zh) 一种印染废水处理工艺
CN210045091U (zh) 一种肥皂泡沫装置
CN221344054U (zh) 一种用于水环境治理的投药装置
CN210473785U (zh) 一种铝银浆生产用配料装置
US2702025A (en) Pumping jack
CN112317048A (zh) 一种水泥加工用原料破碎设备
CN220937815U (zh) 一种定量全自动洗米机
CN217491304U (zh) 浅水型湖泊药剂自动精准喷洒设备
CN214287603U (zh) 一种溶剂橙60滤饼用洗泡槽
CN214974412U (zh) 一种均匀控制粉剂水溶肥流动的排放装置
US3118656A (en) Lightweight cementitious materials
CN222700660U (zh) 一种单阀多水路控制自动投放系统
CN218320843U (zh) 一种处理剂混合添加装置
SU715669A1 (ru) Устройство дл подачи красильного раствора в рабочие емкости текстильных отделочных агрегатов
CN220276367U (zh) 一种滤池自动反冲洗装置
RU2065322C1 (ru) Смеситель
US3300908A (en) Apparatus for orbital finishing