JPS5764946A - Inspecting method for electric characteristics of electronic parts and device used therefor as well as electronic parts - Google Patents

Inspecting method for electric characteristics of electronic parts and device used therefor as well as electronic parts

Info

Publication number
JPS5764946A
JPS5764946A JP55140464A JP14046480A JPS5764946A JP S5764946 A JPS5764946 A JP S5764946A JP 55140464 A JP55140464 A JP 55140464A JP 14046480 A JP14046480 A JP 14046480A JP S5764946 A JPS5764946 A JP S5764946A
Authority
JP
Japan
Prior art keywords
electronic parts
cartridge
inspection
fed
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55140464A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255687B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Nakajima
Mutsuyo Kanetani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55140464A priority Critical patent/JPS5764946A/ja
Publication of JPS5764946A publication Critical patent/JPS5764946A/ja
Publication of JPS6255687B2 publication Critical patent/JPS6255687B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55140464A 1980-10-09 1980-10-09 Inspecting method for electric characteristics of electronic parts and device used therefor as well as electronic parts Granted JPS5764946A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55140464A JPS5764946A (en) 1980-10-09 1980-10-09 Inspecting method for electric characteristics of electronic parts and device used therefor as well as electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140464A JPS5764946A (en) 1980-10-09 1980-10-09 Inspecting method for electric characteristics of electronic parts and device used therefor as well as electronic parts

Publications (2)

Publication Number Publication Date
JPS5764946A true JPS5764946A (en) 1982-04-20
JPS6255687B2 JPS6255687B2 (enrdf_load_stackoverflow) 1987-11-20

Family

ID=15269201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140464A Granted JPS5764946A (en) 1980-10-09 1980-10-09 Inspecting method for electric characteristics of electronic parts and device used therefor as well as electronic parts

Country Status (1)

Country Link
JP (1) JPS5764946A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05152388A (ja) * 1991-11-28 1993-06-18 Sharp Corp 半導体集積回路装置の検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05152388A (ja) * 1991-11-28 1993-06-18 Sharp Corp 半導体集積回路装置の検査装置

Also Published As

Publication number Publication date
JPS6255687B2 (enrdf_load_stackoverflow) 1987-11-20

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