JPS576225B2 - - Google Patents

Info

Publication number
JPS576225B2
JPS576225B2 JP1712173A JP1712173A JPS576225B2 JP S576225 B2 JPS576225 B2 JP S576225B2 JP 1712173 A JP1712173 A JP 1712173A JP 1712173 A JP1712173 A JP 1712173A JP S576225 B2 JPS576225 B2 JP S576225B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1712173A
Other languages
Japanese (ja)
Other versions
JPS4948273A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4948273A publication Critical patent/JPS4948273A/ja
Publication of JPS576225B2 publication Critical patent/JPS576225B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1712173A 1972-02-14 1973-02-13 Expired JPS576225B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22597072A 1972-02-14 1972-02-14

Publications (2)

Publication Number Publication Date
JPS4948273A JPS4948273A (enrdf_load_stackoverflow) 1974-05-10
JPS576225B2 true JPS576225B2 (enrdf_load_stackoverflow) 1982-02-03

Family

ID=22847020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1712173A Expired JPS576225B2 (enrdf_load_stackoverflow) 1972-02-14 1973-02-13

Country Status (10)

Country Link
JP (1) JPS576225B2 (enrdf_load_stackoverflow)
AU (1) AU470515B2 (enrdf_load_stackoverflow)
CA (1) CA976594A (enrdf_load_stackoverflow)
DD (1) DD103095A5 (enrdf_load_stackoverflow)
DE (1) DE2304906C2 (enrdf_load_stackoverflow)
FR (1) FR2172251B1 (enrdf_load_stackoverflow)
GB (1) GB1410262A (enrdf_load_stackoverflow)
IT (1) IT977180B (enrdf_load_stackoverflow)
NL (1) NL175676C (enrdf_load_stackoverflow)
SE (1) SE380673B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425792B2 (enrdf_load_stackoverflow) * 1973-04-16 1979-08-30
JPS5023571A (enrdf_load_stackoverflow) * 1973-06-29 1975-03-13
JPS60192947A (ja) * 1984-03-13 1985-10-01 Mitsubishi Electric Corp 半導体装置製造用フオトマスク材料
US6683414B2 (en) * 2001-10-25 2004-01-27 Northrop Grumman Corporation Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
AU5167373A (en) 1974-08-01
NL175676C (nl) 1984-12-03
DE2304906A1 (de) 1973-08-23
DD103095A5 (enrdf_load_stackoverflow) 1974-01-05
GB1410262A (en) 1975-10-15
FR2172251A1 (enrdf_load_stackoverflow) 1973-09-28
NL175676B (nl) 1984-07-02
CA976594A (en) 1975-10-21
AU470515B2 (en) 1976-03-18
IT977180B (it) 1974-09-10
JPS4948273A (enrdf_load_stackoverflow) 1974-05-10
NL7301491A (enrdf_load_stackoverflow) 1973-08-16
DE2304906C2 (de) 1985-10-24
SE380673B (sv) 1975-11-10
FR2172251B1 (enrdf_load_stackoverflow) 1978-05-26

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