NL175676C - Veldemissiemicroscoop. - Google Patents

Veldemissiemicroscoop.

Info

Publication number
NL175676C
NL175676C NL7301491A NL7301491A NL175676C NL 175676 C NL175676 C NL 175676C NL 7301491 A NL7301491 A NL 7301491A NL 7301491 A NL7301491 A NL 7301491A NL 175676 C NL175676 C NL 175676C
Authority
NL
Netherlands
Prior art keywords
field emission
emission microscope
microscope
field
emission
Prior art date
Application number
NL7301491A
Other languages
English (en)
Other versions
NL175676B (nl
NL7301491A (nl
Original Assignee
Nanometrics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanometrics Inc filed Critical Nanometrics Inc
Publication of NL7301491A publication Critical patent/NL7301491A/xx
Publication of NL175676B publication Critical patent/NL175676B/nl
Application granted granted Critical
Publication of NL175676C publication Critical patent/NL175676C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7301491A 1972-02-14 1973-02-01 Veldemissiemicroscoop. NL175676C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22597072A 1972-02-14 1972-02-14

Publications (3)

Publication Number Publication Date
NL7301491A NL7301491A (nl) 1973-08-16
NL175676B NL175676B (nl) 1984-07-02
NL175676C true NL175676C (nl) 1984-12-03

Family

ID=22847020

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7301491A NL175676C (nl) 1972-02-14 1973-02-01 Veldemissiemicroscoop.

Country Status (10)

Country Link
JP (1) JPS576225B2 (nl)
AU (1) AU470515B2 (nl)
CA (1) CA976594A (nl)
DD (1) DD103095A5 (nl)
DE (1) DE2304906C2 (nl)
FR (1) FR2172251B1 (nl)
GB (1) GB1410262A (nl)
IT (1) IT977180B (nl)
NL (1) NL175676C (nl)
SE (1) SE380673B (nl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425792B2 (nl) * 1973-04-16 1979-08-30
JPS5023571A (nl) * 1973-06-29 1975-03-13
JPS60192947A (ja) * 1984-03-13 1985-10-01 Mitsubishi Electric Corp 半導体装置製造用フオトマスク材料
US6683414B2 (en) * 2001-10-25 2004-01-27 Northrop Grumman Corporation Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
JPS576225B2 (nl) 1982-02-03
CA976594A (en) 1975-10-21
DD103095A5 (nl) 1974-01-05
FR2172251B1 (nl) 1978-05-26
GB1410262A (en) 1975-10-15
JPS4948273A (nl) 1974-05-10
DE2304906C2 (de) 1985-10-24
NL175676B (nl) 1984-07-02
SE380673B (sv) 1975-11-10
AU5167373A (en) 1974-08-01
IT977180B (it) 1974-09-10
AU470515B2 (en) 1976-03-18
FR2172251A1 (nl) 1973-09-28
NL7301491A (nl) 1973-08-16
DE2304906A1 (de) 1973-08-23

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
CNR Transfer of rights (patent application after its laying openfor public ins pection)

Free format text: WARNER LAMBERT TECHNOLOGIES, INC.

CNR Transfer of rights (patent application after its laying openfor public ins pection)

Free format text: NANOMETRICS, INC.

V4 Lapsed because of reaching the maxim lifetime of a patent