IT977180B - Perfezionamento nei cannoni elettronici ad emissione di campo - Google Patents

Perfezionamento nei cannoni elettronici ad emissione di campo

Info

Publication number
IT977180B
IT977180B IT4803773A IT4803773A IT977180B IT 977180 B IT977180 B IT 977180B IT 4803773 A IT4803773 A IT 4803773A IT 4803773 A IT4803773 A IT 4803773A IT 977180 B IT977180 B IT 977180B
Authority
IT
Italy
Prior art keywords
improvement
field emission
emission electronic
electronic guns
guns
Prior art date
Application number
IT4803773A
Other languages
English (en)
Italian (it)
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Application granted granted Critical
Publication of IT977180B publication Critical patent/IT977180B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
IT4803773A 1972-02-14 1973-02-02 Perfezionamento nei cannoni elettronici ad emissione di campo IT977180B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22597072A 1972-02-14 1972-02-14

Publications (1)

Publication Number Publication Date
IT977180B true IT977180B (it) 1974-09-10

Family

ID=22847020

Family Applications (1)

Application Number Title Priority Date Filing Date
IT4803773A IT977180B (it) 1972-02-14 1973-02-02 Perfezionamento nei cannoni elettronici ad emissione di campo

Country Status (10)

Country Link
JP (1) JPS576225B2 (enrdf_load_stackoverflow)
AU (1) AU470515B2 (enrdf_load_stackoverflow)
CA (1) CA976594A (enrdf_load_stackoverflow)
DD (1) DD103095A5 (enrdf_load_stackoverflow)
DE (1) DE2304906C2 (enrdf_load_stackoverflow)
FR (1) FR2172251B1 (enrdf_load_stackoverflow)
GB (1) GB1410262A (enrdf_load_stackoverflow)
IT (1) IT977180B (enrdf_load_stackoverflow)
NL (1) NL175676C (enrdf_load_stackoverflow)
SE (1) SE380673B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425792B2 (enrdf_load_stackoverflow) * 1973-04-16 1979-08-30
JPS5023571A (enrdf_load_stackoverflow) * 1973-06-29 1975-03-13
JPS60192947A (ja) * 1984-03-13 1985-10-01 Mitsubishi Electric Corp 半導体装置製造用フオトマスク材料
US6683414B2 (en) * 2001-10-25 2004-01-27 Northrop Grumman Corporation Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
NL7301491A (enrdf_load_stackoverflow) 1973-08-16
NL175676C (nl) 1984-12-03
AU5167373A (en) 1974-08-01
NL175676B (nl) 1984-07-02
DE2304906A1 (de) 1973-08-23
FR2172251B1 (enrdf_load_stackoverflow) 1978-05-26
CA976594A (en) 1975-10-21
GB1410262A (en) 1975-10-15
AU470515B2 (en) 1976-03-18
DD103095A5 (enrdf_load_stackoverflow) 1974-01-05
DE2304906C2 (de) 1985-10-24
SE380673B (sv) 1975-11-10
JPS4948273A (enrdf_load_stackoverflow) 1974-05-10
JPS576225B2 (enrdf_load_stackoverflow) 1982-02-03
FR2172251A1 (enrdf_load_stackoverflow) 1973-09-28

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