JPS5760776B2 - - Google Patents
Info
- Publication number
- JPS5760776B2 JPS5760776B2 JP51056519A JP5651976A JPS5760776B2 JP S5760776 B2 JPS5760776 B2 JP S5760776B2 JP 51056519 A JP51056519 A JP 51056519A JP 5651976 A JP5651976 A JP 5651976A JP S5760776 B2 JPS5760776 B2 JP S5760776B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
- G06T7/74—Determining position or orientation of objects or cameras using feature-based methods involving reference images or patches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Image Analysis (AREA)
- Image Processing (AREA)
- Wire Bonding (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5651976A JPS52140278A (en) | 1976-05-19 | 1976-05-19 | Position detector |
| US05/797,848 US4291334A (en) | 1976-05-19 | 1977-05-17 | System for detecting the position of an object |
| GB20899/77A GB1577025A (en) | 1976-05-19 | 1977-05-18 | System for detecting position of object |
| DE2722567A DE2722567C2 (de) | 1976-05-19 | 1977-05-18 | Schaltung zur Erkennung der Lage eines Gegenstandes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5651976A JPS52140278A (en) | 1976-05-19 | 1976-05-19 | Position detector |
Related Child Applications (7)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58156261A Division JPS5981770A (ja) | 1983-08-29 | 1983-08-29 | 位置検出装置 |
| JP58156258A Division JPS5981767A (ja) | 1983-08-29 | 1983-08-29 | 信号処理装置 |
| JP58156262A Division JPS5981771A (ja) | 1983-08-29 | 1983-08-29 | 位置検出装置 |
| JP58156257A Division JPS5990162A (ja) | 1983-08-29 | 1983-08-29 | 位置検出装置 |
| JP58156259A Division JPS5981768A (ja) | 1983-08-29 | 1983-08-29 | パタ−ン信号修復方法および装置 |
| JP58156263A Division JPS6027185B2 (ja) | 1983-08-29 | 1983-08-29 | 位置検出装置 |
| JP58156260A Division JPS5981769A (ja) | 1983-08-29 | 1983-08-29 | 位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52140278A JPS52140278A (en) | 1977-11-22 |
| JPS5760776B2 true JPS5760776B2 (US07923587-20110412-C00022.png) | 1982-12-21 |
Family
ID=13029356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5651976A Granted JPS52140278A (en) | 1976-05-19 | 1976-05-19 | Position detector |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4291334A (US07923587-20110412-C00022.png) |
| JP (1) | JPS52140278A (US07923587-20110412-C00022.png) |
| DE (1) | DE2722567C2 (US07923587-20110412-C00022.png) |
| GB (1) | GB1577025A (US07923587-20110412-C00022.png) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2803653C3 (de) * | 1978-01-27 | 1986-05-28 | Texas Instruments Deutschland Gmbh, 8050 Freising | Ausrichtvorrichtung |
| CH643959A5 (de) * | 1978-04-14 | 1984-06-29 | Siemens Ag | Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips. |
| JPS5856972B2 (ja) * | 1978-07-10 | 1983-12-17 | 株式会社東芝 | 位置検出装置 |
| DE2836924A1 (de) * | 1978-08-24 | 1980-03-06 | Blaupunkt Werke Gmbh | Vorrichtung zur automatischen positionierung von elektronischen bauelementen |
| JPS5598842A (en) * | 1978-09-28 | 1980-07-28 | Toshiba Corp | Position detection system |
| JPS57138148A (en) * | 1981-02-20 | 1982-08-26 | Hitachi Ltd | Wire bonding method for integrated circuit |
| JPS58143206A (ja) * | 1982-02-19 | 1983-08-25 | Canon Inc | 位置検知信号処理装置 |
| JPS58176638A (ja) * | 1982-04-09 | 1983-10-17 | Dainippon Screen Mfg Co Ltd | 抜きマスク版の作製方法 |
| JPH0722166B2 (ja) * | 1982-09-22 | 1995-03-08 | 株式会社東芝 | ダイボンダ等におけるペレツト認識方法 |
| US4549087A (en) * | 1982-12-27 | 1985-10-22 | Usm Corporation | Lead sensing system |
| GB2139348B (en) * | 1983-03-26 | 1986-10-01 | Disco Abrasive Systems Ltd | Automatic aligment system |
| GB2146427B (en) * | 1983-08-01 | 1987-10-21 | Canon Kk | Semiconductor manufacture |
| JPS60117380A (ja) * | 1983-11-30 | 1985-06-24 | Fujitsu Ltd | パタ−ン処理方法 |
| JP2531605B2 (ja) * | 1984-02-24 | 1996-09-04 | 株式会社東芝 | 画像の位置合せ装置 |
| JPS60244803A (ja) * | 1984-05-21 | 1985-12-04 | Disco Abrasive Sys Ltd | 自動精密位置合せシステム |
| JPS6165377A (ja) * | 1984-09-07 | 1986-04-03 | Hitachi Ltd | パタ−ン検査装置 |
| US4664520A (en) * | 1984-09-29 | 1987-05-12 | Ngk Insulators, Ltd. | Camera for visual inspection |
| JPH0658681B2 (ja) * | 1984-12-05 | 1994-08-03 | 日立電子エンジニアリング株式会社 | プリント基板のパターン外観検査装置 |
| JPS61161582A (ja) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | パタ−ン認識装置 |
| JPS61161583A (ja) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | パタ−ン認識装置 |
| US4799268A (en) * | 1985-11-12 | 1989-01-17 | Usm Corporation | Lead sense system for component insertion machine |
| JP2765833B2 (ja) * | 1987-02-27 | 1998-06-18 | 株式会社日立製作所 | 半導体装置のワイヤボンディング方法 |
| US5059559A (en) * | 1987-11-02 | 1991-10-22 | Hitachi, Ltd. | Method of aligning and bonding tab inner leads |
| US4972311A (en) * | 1988-08-15 | 1990-11-20 | Kulicke And Soffa Industries Inc. | X-Y table error mapping apparatus and method |
| US5096353A (en) * | 1990-07-27 | 1992-03-17 | Motorola, Inc. | Vision system for a robotic station |
| US5245421A (en) * | 1990-09-19 | 1993-09-14 | Control Automation, Incorporated | Apparatus for inspecting printed circuit boards with surface mounted components |
| US5835641A (en) * | 1992-10-14 | 1998-11-10 | Mitsubishi Denki Kabushiki Kaisha | Image pick-up apparatus for detecting and enlarging registered objects |
| US5385289A (en) * | 1994-02-08 | 1995-01-31 | Digital Equipment Corporation | Embedded features for registration measurement in electronics manufacturing |
| US5457880A (en) * | 1994-02-08 | 1995-10-17 | Digital Equipment Corporation | Embedded features for monitoring electronics assembly manufacturing processes |
| JP5304604B2 (ja) * | 2009-11-13 | 2013-10-02 | 富士通株式会社 | シート接着装置、シート接着方法 |
| KR20220008514A (ko) * | 2020-07-14 | 2022-01-21 | 삼성전자주식회사 | 웨이퍼 본딩 장치 및 웨이퍼 본딩 방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1270801A (en) * | 1968-03-06 | 1972-04-19 | Emi Ltd | Improvements relating to input apparatus for pattern recognition devices |
| US3562536A (en) * | 1968-08-30 | 1971-02-09 | Ibm | Radiation sensitive semiconductor wafer identification system |
| JPS5026068B1 (US07923587-20110412-C00022.png) * | 1969-12-15 | 1975-08-28 | ||
| BE789062A (nl) * | 1971-09-23 | 1973-01-15 | Nederlanden Staat | Automatische adresdetectie |
| US3903363A (en) * | 1974-05-31 | 1975-09-02 | Western Electric Co | Automatic positioning system and method |
| JPS514047A (en) * | 1974-07-01 | 1976-01-13 | Nippon Steel Corp | Kinzokuhenno hyomenketsukanbuteireho |
-
1976
- 1976-05-19 JP JP5651976A patent/JPS52140278A/ja active Granted
-
1977
- 1977-05-17 US US05/797,848 patent/US4291334A/en not_active Expired - Lifetime
- 1977-05-18 GB GB20899/77A patent/GB1577025A/en not_active Expired
- 1977-05-18 DE DE2722567A patent/DE2722567C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52140278A (en) | 1977-11-22 |
| US4291334A (en) | 1981-09-22 |
| DE2722567C2 (de) | 1986-07-03 |
| GB1577025A (en) | 1980-10-15 |
| DE2722567A1 (de) | 1977-11-24 |
