JPS5760206A - Measuring method for length - Google Patents

Measuring method for length

Info

Publication number
JPS5760206A
JPS5760206A JP13626280A JP13626280A JPS5760206A JP S5760206 A JPS5760206 A JP S5760206A JP 13626280 A JP13626280 A JP 13626280A JP 13626280 A JP13626280 A JP 13626280A JP S5760206 A JPS5760206 A JP S5760206A
Authority
JP
Japan
Prior art keywords
width
image
scanning lines
length
video
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13626280A
Other languages
Japanese (ja)
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13626280A priority Critical patent/JPS5760206A/en
Publication of JPS5760206A publication Critical patent/JPS5760206A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enable precise measurement of a width by finding and operating an angle formed by an image of the width of an object and video scanning lines as well as a length of the image traversing the video scanning lines. CONSTITUTION:When an inclined image having a width W emerges from a horizontal scanning line L11 as illustrated in the figure, pulses (S4, S5), (S6, S7). beginning with S3 emerge sequentially on scanning lines L12. and an inclination theta is found as (L14-L11)X(interval of scanning lines)/ (P9-P3=tantheta. The width W turns to be W=(W+DELTAW)costheta based on a length formed by the width of the image traversing the scanning lines. With the image of the object 1 laid on a stage 2 taken by a video camera 3, the positions of pulses S3, S8 and S9 in the example shown in the figure are memorized and the length and angle are computed by a signal processing part 4 and a rotational angle detecting part 7, while the width W is computed by a count processing part 5. A numeral 6 indicates a monitor for the image. By this constitution, precise measurement of the length becomes possible in the direction of the width tilted to the scanning lines, which is fit for the measurement of an infinitesimal length in a unit mum.
JP13626280A 1980-09-30 1980-09-30 Measuring method for length Pending JPS5760206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13626280A JPS5760206A (en) 1980-09-30 1980-09-30 Measuring method for length

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13626280A JPS5760206A (en) 1980-09-30 1980-09-30 Measuring method for length

Publications (1)

Publication Number Publication Date
JPS5760206A true JPS5760206A (en) 1982-04-12

Family

ID=15171067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13626280A Pending JPS5760206A (en) 1980-09-30 1980-09-30 Measuring method for length

Country Status (1)

Country Link
JP (1) JPS5760206A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955029A (en) * 1982-09-24 1984-03-29 Fujitsu Ltd Length measurement of pattern width
JPS60167341A (en) * 1984-02-10 1985-08-30 Hitachi Ltd Detection for fine pattern
JPS6321845A (en) * 1986-07-15 1988-01-29 Jeol Ltd Measuring method for contact hole
US5805290A (en) * 1996-05-02 1998-09-08 International Business Machines Corporation Method of optical metrology of unresolved pattern arrays
US5914784A (en) * 1997-09-30 1999-06-22 International Business Machines Corporation Measurement method for linewidth metrology
US5953128A (en) * 1997-08-28 1999-09-14 International Business Machines Corporation Optically measurable serpentine edge tone reversed targets
US5965309A (en) * 1997-08-28 1999-10-12 International Business Machines Corporation Focus or exposure dose parameter control system using tone reversing patterns
US5976740A (en) * 1997-08-28 1999-11-02 International Business Machines Corporation Process for controlling exposure dose or focus parameters using tone reversing pattern
US6128089A (en) * 1998-07-28 2000-10-03 International Business Machines Corporation Combined segmented and nonsegmented bar-in-bar targets
US6137578A (en) * 1998-07-28 2000-10-24 International Business Machines Corporation Segmented bar-in-bar target

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955029A (en) * 1982-09-24 1984-03-29 Fujitsu Ltd Length measurement of pattern width
JPS60167341A (en) * 1984-02-10 1985-08-30 Hitachi Ltd Detection for fine pattern
JPH0576780B2 (en) * 1984-02-10 1993-10-25 Hitachi Ltd
JPS6321845A (en) * 1986-07-15 1988-01-29 Jeol Ltd Measuring method for contact hole
US6130750A (en) * 1996-05-02 2000-10-10 International Business Machines Corporation Optical metrology tool and method of using same
US5805290A (en) * 1996-05-02 1998-09-08 International Business Machines Corporation Method of optical metrology of unresolved pattern arrays
US6317211B1 (en) 1996-05-02 2001-11-13 International Business Machines Corporation Optical metrology tool and method of using same
US5953128A (en) * 1997-08-28 1999-09-14 International Business Machines Corporation Optically measurable serpentine edge tone reversed targets
US5976740A (en) * 1997-08-28 1999-11-02 International Business Machines Corporation Process for controlling exposure dose or focus parameters using tone reversing pattern
US6004706A (en) * 1997-08-28 1999-12-21 International Business Machines Corporation Etching parameter control system process
US6027842A (en) * 1997-08-28 2000-02-22 International Business Machines Corporation Process for controlling etching parameters
US5965309A (en) * 1997-08-28 1999-10-12 International Business Machines Corporation Focus or exposure dose parameter control system using tone reversing patterns
US5914784A (en) * 1997-09-30 1999-06-22 International Business Machines Corporation Measurement method for linewidth metrology
US6128089A (en) * 1998-07-28 2000-10-03 International Business Machines Corporation Combined segmented and nonsegmented bar-in-bar targets
US6137578A (en) * 1998-07-28 2000-10-24 International Business Machines Corporation Segmented bar-in-bar target

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