JPS5756207B2 - - Google Patents
Info
- Publication number
- JPS5756207B2 JPS5756207B2 JP54048184A JP4818479A JPS5756207B2 JP S5756207 B2 JPS5756207 B2 JP S5756207B2 JP 54048184 A JP54048184 A JP 54048184A JP 4818479 A JP4818479 A JP 4818479A JP S5756207 B2 JPS5756207 B2 JP S5756207B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P52/00—
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4818479A JPS55143036A (en) | 1979-04-19 | 1979-04-19 | Holder for semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4818479A JPS55143036A (en) | 1979-04-19 | 1979-04-19 | Holder for semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55143036A JPS55143036A (en) | 1980-11-08 |
| JPS5756207B2 true JPS5756207B2 (OSRAM) | 1982-11-29 |
Family
ID=12796294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4818479A Granted JPS55143036A (en) | 1979-04-19 | 1979-04-19 | Holder for semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55143036A (OSRAM) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948050U (ja) * | 1982-09-21 | 1984-03-30 | 株式会社東芝 | 保持装置 |
| JPH04133971U (ja) * | 1991-06-04 | 1992-12-14 | 日本ケーブル株式会社 | 索道用の受索輪ライナー |
| JP2001209981A (ja) | 1999-02-09 | 2001-08-03 | Ricoh Co Ltd | 光ディスク基板成膜装置、光ディスク基板成膜方法、基板ホルダーの製造方法、基板ホルダー、光ディスクおよび相変化記録型光ディスク |
| KR101116510B1 (ko) * | 2003-08-01 | 2012-02-28 | 에스지엘 카본 에스이 | 반도체 제조시 웨이퍼를 지지하는 홀더 |
| US7235139B2 (en) | 2003-10-28 | 2007-06-26 | Veeco Instruments Inc. | Wafer carrier for growing GaN wafers |
| US8034409B2 (en) * | 2006-12-20 | 2011-10-11 | Lam Research Corporation | Methods, apparatuses, and systems for fabricating three dimensional integrated circuits |
| JP2011044475A (ja) * | 2009-08-19 | 2011-03-03 | Disco Abrasive Syst Ltd | ウエーハの研削装置 |
-
1979
- 1979-04-19 JP JP4818479A patent/JPS55143036A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55143036A (en) | 1980-11-08 |