JPS5753884A - Inspecting method of magnetic bubble element - Google Patents

Inspecting method of magnetic bubble element

Info

Publication number
JPS5753884A
JPS5753884A JP12798880A JP12798880A JPS5753884A JP S5753884 A JPS5753884 A JP S5753884A JP 12798880 A JP12798880 A JP 12798880A JP 12798880 A JP12798880 A JP 12798880A JP S5753884 A JPS5753884 A JP S5753884A
Authority
JP
Japan
Prior art keywords
wafer
measuring
magnetic resistance
change
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12798880A
Other languages
Japanese (ja)
Inventor
Naoki Kodama
Hitoshi Ikeda
Makoto Suzuki
Norikazu Tsumita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12798880A priority Critical patent/JPS5753884A/en
Publication of JPS5753884A publication Critical patent/JPS5753884A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
    • G11C19/02—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements
    • G11C19/08—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure

Landscapes

  • Magnetic Heads (AREA)

Abstract

PURPOSE:To realize the measurement of various characteristics such as a magnetic resistance, a coercive force in every process on a wafer, by measuring the characteristic of the measuring part for film characteristic consisting of a permalloy film formed on the wafer in every working stage. CONSTITUTION:A part 8 where a chip of a magnetic bubble element is formed at the center of a wafer 6 is coated on the wafer by means of, for instance, a sputtering process to be worked into a strip-shaped pattern. The change of magnetic resistance of that part is measured at this stage of process. Then an SiO2 film 4 is coated on the pattern by a sputtering process, and a through-hole 10 is provided to expose the surface of the part 8 for measuring. The change of magnetic resistance is measured again at this stage of process. In the same way, the subsequent stages of process are carried out successively, and the change of the magnetic resistance of the part 8 for measuring is measured in every process. Based on the results of these measurements, the working conditions for an actual production of magnetic bubble elements are obtained.
JP12798880A 1980-09-17 1980-09-17 Inspecting method of magnetic bubble element Pending JPS5753884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12798880A JPS5753884A (en) 1980-09-17 1980-09-17 Inspecting method of magnetic bubble element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12798880A JPS5753884A (en) 1980-09-17 1980-09-17 Inspecting method of magnetic bubble element

Publications (1)

Publication Number Publication Date
JPS5753884A true JPS5753884A (en) 1982-03-31

Family

ID=14973664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12798880A Pending JPS5753884A (en) 1980-09-17 1980-09-17 Inspecting method of magnetic bubble element

Country Status (1)

Country Link
JP (1) JPS5753884A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155707A (en) * 1984-01-21 1985-08-15 Nippon Silk Kk Apparatus for monitoring reeled cocoon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155707A (en) * 1984-01-21 1985-08-15 Nippon Silk Kk Apparatus for monitoring reeled cocoon

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