JPS52153494A - Measuring method for degree of deterioration of etching solutions - Google Patents

Measuring method for degree of deterioration of etching solutions

Info

Publication number
JPS52153494A
JPS52153494A JP6978476A JP6978476A JPS52153494A JP S52153494 A JPS52153494 A JP S52153494A JP 6978476 A JP6978476 A JP 6978476A JP 6978476 A JP6978476 A JP 6978476A JP S52153494 A JPS52153494 A JP S52153494A
Authority
JP
Japan
Prior art keywords
degree
deterioration
measuring method
etching solutions
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6978476A
Other languages
Japanese (ja)
Other versions
JPS5926667B2 (en
Inventor
Takeo Yoshimi
Hideo Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6978476A priority Critical patent/JPS5926667B2/en
Publication of JPS52153494A publication Critical patent/JPS52153494A/en
Publication of JPS5926667B2 publication Critical patent/JPS5926667B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To wastefulness of an etching solution is prevented and accurate and positive etching is performed by accurately measuring the degree of deterioration from the degree of suspension of the etching solution at the time of producing semiconductor elements.
JP6978476A 1976-06-16 1976-06-16 Etching processing equipment Expired JPS5926667B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6978476A JPS5926667B2 (en) 1976-06-16 1976-06-16 Etching processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6978476A JPS5926667B2 (en) 1976-06-16 1976-06-16 Etching processing equipment

Publications (2)

Publication Number Publication Date
JPS52153494A true JPS52153494A (en) 1977-12-20
JPS5926667B2 JPS5926667B2 (en) 1984-06-29

Family

ID=13412720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6978476A Expired JPS5926667B2 (en) 1976-06-16 1976-06-16 Etching processing equipment

Country Status (1)

Country Link
JP (1) JPS5926667B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0258466U (en) * 1988-10-23 1990-04-26

Also Published As

Publication number Publication date
JPS5926667B2 (en) 1984-06-29

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