JPS5440573A - Measuring instrument for characteristics of semiconductor pellet - Google Patents

Measuring instrument for characteristics of semiconductor pellet

Info

Publication number
JPS5440573A
JPS5440573A JP10679677A JP10679677A JPS5440573A JP S5440573 A JPS5440573 A JP S5440573A JP 10679677 A JP10679677 A JP 10679677A JP 10679677 A JP10679677 A JP 10679677A JP S5440573 A JPS5440573 A JP S5440573A
Authority
JP
Japan
Prior art keywords
measuring instrument
semiconductor pellet
instrument
pellet
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10679677A
Other languages
Japanese (ja)
Inventor
Yoshimi Taira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10679677A priority Critical patent/JPS5440573A/en
Publication of JPS5440573A publication Critical patent/JPS5440573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To manufacture an instrument which is able to measure characteristics of several pellets formed on a wafer at the same time.
JP10679677A 1977-09-07 1977-09-07 Measuring instrument for characteristics of semiconductor pellet Pending JPS5440573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10679677A JPS5440573A (en) 1977-09-07 1977-09-07 Measuring instrument for characteristics of semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10679677A JPS5440573A (en) 1977-09-07 1977-09-07 Measuring instrument for characteristics of semiconductor pellet

Publications (1)

Publication Number Publication Date
JPS5440573A true JPS5440573A (en) 1979-03-30

Family

ID=14442842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10679677A Pending JPS5440573A (en) 1977-09-07 1977-09-07 Measuring instrument for characteristics of semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS5440573A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919342A (en) * 1982-07-23 1984-01-31 Hitachi Ltd Probe card
JPS604562A (en) * 1983-06-23 1985-01-11 Mitsubishi Gas Chem Co Inc Solderable electrically conductive composition
JPS6435597A (en) * 1987-07-31 1989-02-06 Sharp Kk Inspector for liquid crystal display device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919342A (en) * 1982-07-23 1984-01-31 Hitachi Ltd Probe card
JPS604562A (en) * 1983-06-23 1985-01-11 Mitsubishi Gas Chem Co Inc Solderable electrically conductive composition
JPS6435597A (en) * 1987-07-31 1989-02-06 Sharp Kk Inspector for liquid crystal display device

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