JPS575330A - Specimen cassette for microminiature machining apparatus - Google Patents

Specimen cassette for microminiature machining apparatus

Info

Publication number
JPS575330A
JPS575330A JP7875880A JP7875880A JPS575330A JP S575330 A JPS575330 A JP S575330A JP 7875880 A JP7875880 A JP 7875880A JP 7875880 A JP7875880 A JP 7875880A JP S575330 A JPS575330 A JP S575330A
Authority
JP
Japan
Prior art keywords
specimen
holder
precisely
machining apparatus
microminiature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7875880A
Other languages
Japanese (ja)
Inventor
Toru Tojo
Tsutomu Ito
Shuntaro Hata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7875880A priority Critical patent/JPS575330A/en
Publication of JPS575330A publication Critical patent/JPS575330A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To readily and precisely position a specimen by providing a rotatable specimen holder and a positioning mechanism at a cassette body set in the specimen chamber of a microminature machining apparatus. CONSTITUTION:A rotatable specimen holder 7 is provided in a cassette body 1 having a flange 2, guide rails 3, and a position controlling slot 4, a projection 9 is laterally moved with a pin 8 as a rotating shaft, thereby enabling the rotation of the holder 7, a circular slot 11 and a spring 12 are provided in the holder, thereby precisely fixely positioning the specimen therein, the holder is rotated by an adjustment screw provided therein, and the position is thus corrected. Since it is not necessary to associate a rotary adjusting mechanism in the table of the exposure unit in this manner, it can largely simplify the configuration of the apparatus and can slso precisely position the specimen.
JP7875880A 1980-06-11 1980-06-11 Specimen cassette for microminiature machining apparatus Pending JPS575330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7875880A JPS575330A (en) 1980-06-11 1980-06-11 Specimen cassette for microminiature machining apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7875880A JPS575330A (en) 1980-06-11 1980-06-11 Specimen cassette for microminiature machining apparatus

Publications (1)

Publication Number Publication Date
JPS575330A true JPS575330A (en) 1982-01-12

Family

ID=13670791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7875880A Pending JPS575330A (en) 1980-06-11 1980-06-11 Specimen cassette for microminiature machining apparatus

Country Status (1)

Country Link
JP (1) JPS575330A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979524A (en) * 1982-10-29 1984-05-08 Toshiba Corp Electrostatic chuck cassette for sample holding
JPS6077422A (en) * 1983-10-04 1985-05-02 Nec Corp Positioning method for drawing position by electron beam exposure and sample holder of electron beam exposure device
JPH08203800A (en) * 1995-01-23 1996-08-09 Toshiba Mach Co Ltd Fixing device of sample holder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979524A (en) * 1982-10-29 1984-05-08 Toshiba Corp Electrostatic chuck cassette for sample holding
JPS6077422A (en) * 1983-10-04 1985-05-02 Nec Corp Positioning method for drawing position by electron beam exposure and sample holder of electron beam exposure device
JPH0578167B2 (en) * 1983-10-04 1993-10-28 Nippon Electric Co
JPH08203800A (en) * 1995-01-23 1996-08-09 Toshiba Mach Co Ltd Fixing device of sample holder

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