JPS5745282A - Semiconductor pressure converter - Google Patents
Semiconductor pressure converterInfo
- Publication number
- JPS5745282A JPS5745282A JP11978680A JP11978680A JPS5745282A JP S5745282 A JPS5745282 A JP S5745282A JP 11978680 A JP11978680 A JP 11978680A JP 11978680 A JP11978680 A JP 11978680A JP S5745282 A JPS5745282 A JP S5745282A
- Authority
- JP
- Japan
- Prior art keywords
- port
- housing
- air hole
- eccentric
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 230000003116 impacting effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0636—Protection against aggressive medium in general using particle filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11978680A JPS5745282A (en) | 1980-09-01 | 1980-09-01 | Semiconductor pressure converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11978680A JPS5745282A (en) | 1980-09-01 | 1980-09-01 | Semiconductor pressure converter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5745282A true JPS5745282A (en) | 1982-03-15 |
JPS6155266B2 JPS6155266B2 (enrdf_load_stackoverflow) | 1986-11-27 |
Family
ID=14770181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11978680A Granted JPS5745282A (en) | 1980-09-01 | 1980-09-01 | Semiconductor pressure converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5745282A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019159814A1 (ja) * | 2018-02-15 | 2019-08-22 | ミツミ電機株式会社 | 圧力センサ装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61236083A (ja) * | 1985-04-11 | 1986-10-21 | Matsushita Electric Ind Co Ltd | カ−トリツジ |
-
1980
- 1980-09-01 JP JP11978680A patent/JPS5745282A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019159814A1 (ja) * | 2018-02-15 | 2019-08-22 | ミツミ電機株式会社 | 圧力センサ装置 |
JPWO2019159814A1 (ja) * | 2018-02-15 | 2021-01-28 | ミツミ電機株式会社 | 圧力センサ装置 |
US11137305B2 (en) | 2018-02-15 | 2021-10-05 | Mitsumi Electric Co., Ltd. | Pressure sensor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6155266B2 (enrdf_load_stackoverflow) | 1986-11-27 |
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