JPS5739405A - Control device of integral process - Google Patents

Control device of integral process

Info

Publication number
JPS5739405A
JPS5739405A JP11530980A JP11530980A JPS5739405A JP S5739405 A JPS5739405 A JP S5739405A JP 11530980 A JP11530980 A JP 11530980A JP 11530980 A JP11530980 A JP 11530980A JP S5739405 A JPS5739405 A JP S5739405A
Authority
JP
Japan
Prior art keywords
deviation
value
variable
prescribed value
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11530980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362762B2 (https=
Inventor
Takaaki Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11530980A priority Critical patent/JPS5739405A/ja
Publication of JPS5739405A publication Critical patent/JPS5739405A/ja
Publication of JPS6362762B2 publication Critical patent/JPS6362762B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B5/00—Anti-hunting arrangements
    • G05B5/01—Anti-hunting arrangements electric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Feedback Control In General (AREA)
JP11530980A 1980-08-21 1980-08-21 Control device of integral process Granted JPS5739405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11530980A JPS5739405A (en) 1980-08-21 1980-08-21 Control device of integral process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11530980A JPS5739405A (en) 1980-08-21 1980-08-21 Control device of integral process

Publications (2)

Publication Number Publication Date
JPS5739405A true JPS5739405A (en) 1982-03-04
JPS6362762B2 JPS6362762B2 (https=) 1988-12-05

Family

ID=14659428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11530980A Granted JPS5739405A (en) 1980-08-21 1980-08-21 Control device of integral process

Country Status (1)

Country Link
JP (1) JPS5739405A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784478A (en) * 1985-08-02 1988-11-15 Olympus Optical Co., Ltd. Microscope objective

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784478A (en) * 1985-08-02 1988-11-15 Olympus Optical Co., Ltd. Microscope objective

Also Published As

Publication number Publication date
JPS6362762B2 (https=) 1988-12-05

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