JPS5737270A - Surface electrometer - Google Patents

Surface electrometer

Info

Publication number
JPS5737270A
JPS5737270A JP11184880A JP11184880A JPS5737270A JP S5737270 A JPS5737270 A JP S5737270A JP 11184880 A JP11184880 A JP 11184880A JP 11184880 A JP11184880 A JP 11184880A JP S5737270 A JPS5737270 A JP S5737270A
Authority
JP
Japan
Prior art keywords
printed
electrode
substrate
shielded
preamplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11184880A
Other languages
Japanese (ja)
Inventor
Koji Suzuki
Koki Kuroda
Joji Nagahira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11184880A priority Critical patent/JPS5737270A/en
Publication of JPS5737270A publication Critical patent/JPS5737270A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R5/00—Instruments for converting a single current or a single voltage into a mechanical displacement
    • G01R5/28—Electrostatic instruments
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE:To make it possible to perform accurate measurement with excellent moisture proof and difficultly electrifiable characteristics, by forming a measuring electrode, a preamplifier, and a shielded electrode on the same ceramic substarate by evaporation or printing. CONSTITUTION:The same ceramic substrate 10 is used as a printed board for the measuring electrode and the preamplifier. The measuring electrode 11 is printed on the back of said substrate. The vicinity of said electrode is enclosed by the printed shielded electrode 12 so as to remove the induction of a chopper driving signal. In the meantime, on the surface of the substrate 10, the other circuit pattern of the shielded electrode 12 is printed, and resistors R1-R3 are printed by using printing resistors for metal glaze. An FET is temporarily fixed by cream solder and brazed by using a hot plate. In this constitution, moisture proof is excellent, electrification is hardly caused, so accurate measurement can be performed.
JP11184880A 1980-08-15 1980-08-15 Surface electrometer Pending JPS5737270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11184880A JPS5737270A (en) 1980-08-15 1980-08-15 Surface electrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11184880A JPS5737270A (en) 1980-08-15 1980-08-15 Surface electrometer

Publications (1)

Publication Number Publication Date
JPS5737270A true JPS5737270A (en) 1982-03-01

Family

ID=14571675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11184880A Pending JPS5737270A (en) 1980-08-15 1980-08-15 Surface electrometer

Country Status (1)

Country Link
JP (1) JPS5737270A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169771A (en) * 1984-02-14 1985-09-03 Sumitomo Electric Ind Ltd Electrostatic potential detection apparatus
US4760342A (en) * 1985-02-19 1988-07-26 U.S. Philips Corp. Electrostatic induction probe arrangement using several probes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169771A (en) * 1984-02-14 1985-09-03 Sumitomo Electric Ind Ltd Electrostatic potential detection apparatus
US4760342A (en) * 1985-02-19 1988-07-26 U.S. Philips Corp. Electrostatic induction probe arrangement using several probes

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