JPS5735369A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5735369A JPS5735369A JP11195180A JP11195180A JPS5735369A JP S5735369 A JPS5735369 A JP S5735369A JP 11195180 A JP11195180 A JP 11195180A JP 11195180 A JP11195180 A JP 11195180A JP S5735369 A JPS5735369 A JP S5735369A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor substrate
- type
- forming
- embeded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1443—Devices controlled by radiation with at least one potential jump or surface barrier
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Exposure Control For Cameras (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To prevent the leak current due to wiring, by forming a bipolar IC region on one main surface of a semiconductor substrate and forming a photodiode region on the other surface. CONSTITUTION:A P type diffused layer 2 is formed by diffusing boron in the main surface of the semiconductor substrate 1a which is polished to obtain a mirror surface. Then, an N type embeded layer 3 is formed and an N type epitaxial layer 4 is formed on the semiconductor substrate 1a including embeded layer 3. Thereafter, an SiO2 film is formed on the epitaxial layer 4, and P type separating layer 6 is formed. Then, the back surface of the semiconductor substrate 1a is etched out, and mirror finishing is performed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11195180A JPS5735369A (en) | 1980-08-11 | 1980-08-11 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11195180A JPS5735369A (en) | 1980-08-11 | 1980-08-11 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5735369A true JPS5735369A (en) | 1982-02-25 |
Family
ID=14574233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11195180A Pending JPS5735369A (en) | 1980-08-11 | 1980-08-11 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735369A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201326A (en) * | 1986-02-28 | 1987-09-05 | Canon Inc | Photometric device |
EP0537514A2 (en) * | 1991-10-14 | 1993-04-21 | Mitsubishi Denki Kabushiki Kaisha | Optoelectronic integrated circuit |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5093586A (en) * | 1973-12-19 | 1975-07-25 | ||
JPS50125626A (en) * | 1974-03-19 | 1975-10-02 | ||
JPS50125692A (en) * | 1974-03-20 | 1975-10-02 | ||
JPS54139497A (en) * | 1978-04-17 | 1979-10-29 | Ibm | Pin photodiode |
JPS5515229A (en) * | 1978-07-18 | 1980-02-02 | Semiconductor Res Found | Semiconductor photograph device |
-
1980
- 1980-08-11 JP JP11195180A patent/JPS5735369A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5093586A (en) * | 1973-12-19 | 1975-07-25 | ||
JPS50125626A (en) * | 1974-03-19 | 1975-10-02 | ||
JPS50125692A (en) * | 1974-03-20 | 1975-10-02 | ||
JPS54139497A (en) * | 1978-04-17 | 1979-10-29 | Ibm | Pin photodiode |
JPS5515229A (en) * | 1978-07-18 | 1980-02-02 | Semiconductor Res Found | Semiconductor photograph device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201326A (en) * | 1986-02-28 | 1987-09-05 | Canon Inc | Photometric device |
JPH0549053B2 (en) * | 1986-02-28 | 1993-07-23 | Canon Kk | |
EP0537514A2 (en) * | 1991-10-14 | 1993-04-21 | Mitsubishi Denki Kabushiki Kaisha | Optoelectronic integrated circuit |
US5357121A (en) * | 1991-10-14 | 1994-10-18 | Mitsubishi Denki Kabushiki Kaisha | Optoelectronic integrated circuit |
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