JPS52153387A - Preparation of planer type semiconductor device - Google Patents

Preparation of planer type semiconductor device

Info

Publication number
JPS52153387A
JPS52153387A JP7027776A JP7027776A JPS52153387A JP S52153387 A JPS52153387 A JP S52153387A JP 7027776 A JP7027776 A JP 7027776A JP 7027776 A JP7027776 A JP 7027776A JP S52153387 A JPS52153387 A JP S52153387A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
type semiconductor
planer type
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7027776A
Other languages
Japanese (ja)
Inventor
Seiichi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7027776A priority Critical patent/JPS52153387A/en
Publication of JPS52153387A publication Critical patent/JPS52153387A/en
Pending legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)

Abstract

PURPOSE: To enhance the pressure resistance of a planer type element by treating the element with an aqueous solution of a hydrogen peroxide system to make negative the charges on the interface of an insulating film and a silicon substrate, thus enabling the easy widening of a depletion layer in the vicinity of the surface of the substrate of a N type base zone.
COPYRIGHT: (C)1977,JPO&Japio
JP7027776A 1976-06-14 1976-06-14 Preparation of planer type semiconductor device Pending JPS52153387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7027776A JPS52153387A (en) 1976-06-14 1976-06-14 Preparation of planer type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7027776A JPS52153387A (en) 1976-06-14 1976-06-14 Preparation of planer type semiconductor device

Publications (1)

Publication Number Publication Date
JPS52153387A true JPS52153387A (en) 1977-12-20

Family

ID=13426840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7027776A Pending JPS52153387A (en) 1976-06-14 1976-06-14 Preparation of planer type semiconductor device

Country Status (1)

Country Link
JP (1) JPS52153387A (en)

Similar Documents

Publication Publication Date Title
JPS5356972A (en) Mesa type semiconductor device
JPS5338271A (en) Semiconductor device
JPS52153387A (en) Preparation of planer type semiconductor device
JPS5379378A (en) Semoconductor davice and its production
JPS52109369A (en) Manufacture of semiconductor device
JPS51114881A (en) Semiconductor device manufacturing method
JPS534469A (en) Semiconductor device
JPS5380184A (en) Manufacture of semiconductor device
JPS52129380A (en) Semiconductor device
JPS52153386A (en) Preparation of planer type semiconductor device
JPS52117063A (en) Preparation of ohmic ontact layer in semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS526081A (en) Semiconductor wafer
JPS5377168A (en) Production of semiconductor device
JPS51116678A (en) Semiconductor device
JPS5287373A (en) Production of semiconductor device
JPS51123071A (en) Fabrication technique of semiconductor device
JPS5352388A (en) Semiconductor device
JPS5376763A (en) Semiconductor rectifying device
JPS5390784A (en) Production of semiconductor device
JPS52153677A (en) Sos type semiconductor device
JPS539488A (en) Production of semiconductor device
JPS5372482A (en) Manufacture for semiconductor device
JPS5210676A (en) Semiconductor device
JPS53121483A (en) Semiconductor device