JPS5731290B2 - - Google Patents
Info
- Publication number
- JPS5731290B2 JPS5731290B2 JP1627178A JP1627178A JPS5731290B2 JP S5731290 B2 JPS5731290 B2 JP S5731290B2 JP 1627178 A JP1627178 A JP 1627178A JP 1627178 A JP1627178 A JP 1627178A JP S5731290 B2 JPS5731290 B2 JP S5731290B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1627178A JPS54109382A (en) | 1978-02-15 | 1978-02-15 | Electron ray exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1627178A JPS54109382A (en) | 1978-02-15 | 1978-02-15 | Electron ray exposure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54109382A JPS54109382A (en) | 1979-08-27 |
| JPS5731290B2 true JPS5731290B2 (ja) | 1982-07-03 |
Family
ID=11911873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1627178A Granted JPS54109382A (en) | 1978-02-15 | 1978-02-15 | Electron ray exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54109382A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224712B2 (ja) * | 1986-12-25 | 1990-05-30 | Honda Motor Co Ltd |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5588328A (en) * | 1978-12-27 | 1980-07-04 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Exposing method to electron beam |
| JPS59135727A (ja) * | 1983-01-24 | 1984-08-04 | Jeol Ltd | 荷電粒子ビ−ム露光方法 |
| JPS59169132A (ja) * | 1983-03-16 | 1984-09-25 | Hitachi Ltd | 電子線描画装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5549768A (en) * | 1978-10-02 | 1980-04-10 | Ibm | Data processor |
-
1978
- 1978-02-15 JP JP1627178A patent/JPS54109382A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5549768A (en) * | 1978-10-02 | 1980-04-10 | Ibm | Data processor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224712B2 (ja) * | 1986-12-25 | 1990-05-30 | Honda Motor Co Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54109382A (en) | 1979-08-27 |