JPS5730254A - Complex surface analyzer - Google Patents

Complex surface analyzer

Info

Publication number
JPS5730254A
JPS5730254A JP10532880A JP10532880A JPS5730254A JP S5730254 A JPS5730254 A JP S5730254A JP 10532880 A JP10532880 A JP 10532880A JP 10532880 A JP10532880 A JP 10532880A JP S5730254 A JPS5730254 A JP S5730254A
Authority
JP
Japan
Prior art keywords
ion
specimen
spectrograph
mass
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10532880A
Other languages
Japanese (ja)
Other versions
JPS645745B2 (en
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10532880A priority Critical patent/JPS5730254A/en
Publication of JPS5730254A publication Critical patent/JPS5730254A/en
Publication of JPS645745B2 publication Critical patent/JPS645745B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To simplify and to reduce the size of an analyzer by arranging a rolling frame at the rear of an electrostatic energy analyzer while providing a series arrangement of a triple pole mass-spectrograph and a charged particle detector, and a charged particle detector. CONSTITUTION:An ion gun 3 is operated to irradiate a specimen 4 with an ion beam of rare gas then the energy selection is performed on the secondary ion emitted from the specimen 4 by means of an energy analyzer 5 thereafter it is provided through a slit 11 to a triple pole mass-spectrograph 8 to perform the mass separation and detected by an electron multiplier tube 9 thus to perform the secondary ion mass spectrograph. When the radius beam passing through the slit 10 is coincided with the center line of a particle beam flux produced from the energy analyzer 5, the ion scattering spectral analysis is performed. While when an electron gun 1 or an X-ray source 2 is operated to irradiate the specimen 4 with an electron beam or X-ray, auger electrospectral analysis or X-ray photoelectric spectral analysis is performed.
JP10532880A 1980-07-30 1980-07-30 Complex surface analyzer Granted JPS5730254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10532880A JPS5730254A (en) 1980-07-30 1980-07-30 Complex surface analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10532880A JPS5730254A (en) 1980-07-30 1980-07-30 Complex surface analyzer

Publications (2)

Publication Number Publication Date
JPS5730254A true JPS5730254A (en) 1982-02-18
JPS645745B2 JPS645745B2 (en) 1989-01-31

Family

ID=14404647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10532880A Granted JPS5730254A (en) 1980-07-30 1980-07-30 Complex surface analyzer

Country Status (1)

Country Link
JP (1) JPS5730254A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0272924A (en) * 1988-09-08 1990-03-13 Sekisui Plastics Co Ltd Cooling device for resin molding

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0272924A (en) * 1988-09-08 1990-03-13 Sekisui Plastics Co Ltd Cooling device for resin molding

Also Published As

Publication number Publication date
JPS645745B2 (en) 1989-01-31

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