JPS55163441A - Fluorescent analyzing method - Google Patents

Fluorescent analyzing method

Info

Publication number
JPS55163441A
JPS55163441A JP7169579A JP7169579A JPS55163441A JP S55163441 A JPS55163441 A JP S55163441A JP 7169579 A JP7169579 A JP 7169579A JP 7169579 A JP7169579 A JP 7169579A JP S55163441 A JPS55163441 A JP S55163441A
Authority
JP
Japan
Prior art keywords
irradiated
plasma
excited light
spectroscope
counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7169579A
Other languages
Japanese (ja)
Other versions
JPS5945940B2 (en
Inventor
Shigemi Furubiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7169579A priority Critical patent/JPS5945940B2/en
Publication of JPS55163441A publication Critical patent/JPS55163441A/en
Publication of JPS5945940B2 publication Critical patent/JPS5945940B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To enable to precisely analyze almost all elements by a method wherein a sample target is irradiated with an ion beam or by a neutral beam, the produced plasma is irradiated with the excited light and the radiated photospectrum is detected. CONSTITUTION:The inside of a vacuum bell-jar 1 is made high vacuum and the ion beam or the neutral beam from the beam source 4 are irradiated on a metallic target 3. Near the surface of the metallic target 3 the plasma is generated. On said plasma 5 the excited light from the powerful excited light source is irradiated. The fluorescence then generated is focused through a focusing system 8 to lead it to a spectroscope 9. The light from the spectroscope 9 is received by the photomultiplier tube 10, its output is added to a counter 14 through an amplifier 11, a discriminator 13 to be counted. The output of the counter 14 is put out to an analogue output end.
JP7169579A 1979-06-07 1979-06-07 Fluorescence analysis Expired JPS5945940B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7169579A JPS5945940B2 (en) 1979-06-07 1979-06-07 Fluorescence analysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7169579A JPS5945940B2 (en) 1979-06-07 1979-06-07 Fluorescence analysis

Publications (2)

Publication Number Publication Date
JPS55163441A true JPS55163441A (en) 1980-12-19
JPS5945940B2 JPS5945940B2 (en) 1984-11-09

Family

ID=13467928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7169579A Expired JPS5945940B2 (en) 1979-06-07 1979-06-07 Fluorescence analysis

Country Status (1)

Country Link
JP (1) JPS5945940B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0070523A2 (en) * 1981-07-17 1983-01-26 Western Electric Company, Incorporated Device fabrication using gas-solid processes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0070523A2 (en) * 1981-07-17 1983-01-26 Western Electric Company, Incorporated Device fabrication using gas-solid processes

Also Published As

Publication number Publication date
JPS5945940B2 (en) 1984-11-09

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