JPS645745B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface analysis device that can apply a plurality of types of surface analysis methods by switching operations.

Sample surface analysis involves X-ray photoelectron analysis, in which the sample is irradiated with X-rays and the energy of the photoelectrons emitted from the sample is analyzed, and Auger electron spectroscopy, in which the sample is irradiated with an electron beam and the energy of Auger electrons emitted from the sample is analyzed. , Ion scattering spectroscopy, in which a sample is irradiated with an ion beam and the energy of the irradiated ions scattered on the sample surface is analyzed; Similarly, the sample is irradiated with an ion beam, and ions (secondary ions) are released from the sample due to ion bombardment. There are various methods such as secondary ion mass spectrometry for performing mass spectrometry, and there are dedicated devices for each method. However, since these analytical methods place the sample in a vacuum, applying these various analytical methods to the same sample requires a lot of effort and time, and it is extremely difficult to analyze the same part of the sample using various methods. In addition, when the sample is transferred from one device to another, the surface of the sample is exposed to air, which alters the quality of the sample surface, making it difficult to comprehensively evaluate the data obtained by various analytical methods.

For this reason, an apparatus has been proposed that can perform the various surface analysis methods described above with one apparatus. These proposals are based on combining the radiation sources that irradiate the sample, and the plan is to place various analytical devices around the sample in order to analyze the various types of radiation emitted from the sample. There is a problem with increasing the size.

Therefore, the present invention has been made with the aim of downsizing a surface analysis device that can perform the various surface analysis methods described above with a single device.

In the various surface analysis methods mentioned above, the part that analyzes the radiation emitted from the sample consists of a charged particle beam energy analyzer, an ion mass analyzer, and a charged particle detector. Electron spectroscopy does not require a mass spectrometer, and ion scattering spectroscopy does not require a mass spectrometer in principle, but there are cases where it is better to have one (such as when the scattered ions and secondary ions have close energies) secondary ion mass spectrometry uses a series arrangement of an energy analyzer and a mass analyzer.

The present invention aims to integrate a radiation analysis section with different combinations of components depending on the analysis method, and is based on the assumption that the radiation source that irradiates the sample will be integrated, and a swinging frame is installed behind the electrostatic energy analyzer. place,
On this frame, a quadrupole mass spectrometer and a charged particle detector are arranged in series on one side along two radial directions centered on the center of oscillation, and a charged particle detector is installed independently on the other one. The present invention provides a surface analysis device in which any one of these can be positioned behind an energy analyzer. The present invention will be explained below with reference to Examples.

The figure shows an embodiment of the invention. 1 is an electron gun, 2 is an X-ray source, and 3 is an ion gun, each of which projects an electron beam, an X-ray beam, and an ion beam onto a sample 4, respectively. Although the electron gun 1 and the ion gun 3 are arranged in different directions with respect to the sample 4, they can be arranged in series to share a particle beam optical system. Various types of radiation are emitted from the sample 4 depending on the type of radiation to be irradiated and enter the charged particle beam energy analyzer 5. The charged particle beam energy analyzer 5 is of an electrostatic type, and applies a voltage between, for example, concentric double spherical shell electrodes. Since electrostatic energy analyzers are completely unaffected by the mass of charged particles, they can be applied to either ions or electrons by simply changing the direction of the voltage applied to the electrodes. Although the incident direction and the outgoing direction of charged particles are different, they are drawn on a straight line in the figure for convenience. Reference numeral 6 denotes a swinging frame arranged after the charged particle beam energy analyzer 5 (on the particle beam emission side) and can swing around a fulcrum pin 12 . Two slits 10 and 11 are provided in the frame 6 at the fan-shaped edge with the pin 12 at the center, and an electron multiplier tube 7 is installed after the slit 10 on one radius line connecting the slit 10 and the pin 12. On another radial line connecting the slit 11 and the pin 12, a quadrupole mass spectrometer 8 and an electron multiplier 9 are arranged in series behind the slit 11. By swinging the frame 6, either of the two radius lines can be made to coincide with the center line of the particle beam flux emitted from the charged particle beam energy analyzer 5. 13 is a rod for operating the frame 6 from outside the vacuum vessel wall 14 of the surface analysis device; and a bellows 15
This maintains airtightness between the rod 13 and the vessel wall 14. 16 is a bellows for pressure balance on the opposite side of the frame from the rod 13.

The figure shows a state in which the radial line passing through the slit 11 coincides with the center line of the emitted particle beam from the charged particle energy analyzer 5. In this case, the ion gun 3 is operated and the ion beam of rare gas such as He is used to sample the sample. 4, and the secondary ions emitted from the sample are energy-selected by the energy analyzer 5, and then the slit 11
Secondary ion mass spectrometry can be performed by making the ions enter a quadrupole mass spectrometer 8 through the ion beam, performing mass separation, and detecting with an electron multiplier tube 9. When the frame 6 is rotated in the direction of the arrow to align the radius line passing through the slit 10 with the center line of the emitted particle beam flux of the energy analyzer 5, the ion gun 3 is activated to detect scattered ions emitted from the sample 4. Ion scattering spectroscopic analysis can be carried out by selecting energy with an energy analyzer 5, performing energy scanning, and detecting the ions emitted from the analyzer 5 through a slit 10 with an electron multiplier 7. In addition, the electron gun 1 or the X-ray source 2 is operated to irradiate the sample 4 with an electron beam or X-rays, and the energy of the electrons emitted from the sample is separated while being scanned by the energy analyzer 5.
Auger electron spectroscopy or X-ray photoelectron spectroscopy can be carried out by detecting with an electron multiplier tube 7 through 0. In these cases, the polarity of the voltage applied between the electrodes of the energy analyzer 5 is reversed to that when performing ion energy analysis. In addition, in the above-mentioned ion scattering spectroscopic analysis, when the energies of the ions scattered by the sample of irradiated ions and the secondary ions generated from the atoms that made up the sample itself are close to each other, it is difficult to distinguish between the two on the energy spectrum. In this method, the slit 11 is positioned behind the energy analyzer 5 as shown in the figure, and the energy-analyzed ions are further mass-separated, secondary ions are removed, and only the scattered ions are detected by the electron multiplier 9. be able to.

The surface analysis device of the present invention has the above-mentioned configuration,
A single device can perform various types of surface analysis with simple switching operations, and the radiation analysis section for these analyzes uses a common charged particle energy dispersion section, and only the section located behind it is mounted on a swinging frame. Since the device is replaceable, the device configuration can be made simple and compact.

[Brief explanation of drawings]

The drawing is a front view showing essential parts of an apparatus according to an embodiment of the present invention. 1... Electron gun, 2... X-ray source, 3... Ion gun, 4... Sample, 5... Charged particle energy analyzer, 6... Oscillating frame, 7, 9... Electron multiplier, 8...quadrupole analyzer, 10,11...slit.

Claims (1)

[Claims] 1. Equipped with an electron beam source, ion beam source, X-ray source, etc. for irradiating the sample with electron beams, ion beams, X-rays, etc.
As a means of analyzing various types of radiation emitted from a sample, a charged particle energy analyzer into which the various types of radiation mentioned above are incident is provided, and a swinging frame is placed behind it, and two sensors are placed on this frame, with the center of swing being the center of the charged particle energy analyzer. A quadrupole mass spectrometer and a charged particle detector are installed in series along one radial direction, and a charged particle detector is installed independently on the other, and one of these is used for the above-mentioned charged particle energy analysis. A composite surface analysis device that can be placed at the rear of the instrument.