JPS5913151B2 - quadrupole mass spectrometer - Google Patents
quadrupole mass spectrometerInfo
- Publication number
- JPS5913151B2 JPS5913151B2 JP54092064A JP9206479A JPS5913151B2 JP S5913151 B2 JPS5913151 B2 JP S5913151B2 JP 54092064 A JP54092064 A JP 54092064A JP 9206479 A JP9206479 A JP 9206479A JP S5913151 B2 JPS5913151 B2 JP S5913151B2
- Authority
- JP
- Japan
- Prior art keywords
- ions
- positive
- negative ions
- mass
- guide means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
Description
【発明の詳細な説明】
質量分析計は、元素分析装置として広く一般に普及して
いる。DETAILED DESCRIPTION OF THE INVENTION Mass spectrometers are widely used as elemental analysis devices.
このうち四重極質量分析計は、他のタイプの質量分析計
にくらべて安価である、小型軽量である、高速分析がで
きる、などの特徴を持ち、残留ガス分析計（ＲＧＡ）、
ガスクロマトグラフ質量分析計（ＧＣ−ＭＳ）、二次イ
オン質量分析計（ＳＩＭＳ）などに使用されている。こ
のうちＳＩＭＳは、固体表面分析法の１つとして、急速
に発展してきた装置で、薄膜、半導体５ のキヤラクタ
リゼーシヨンに応用されている。ＳＩＭＳは、高エネル
ギーの一次イオンを、分析しようとする試料に照射し、
スパッタリングに伴つて試料表面から放出される試料の
構成元素のイオンを、質量分析する装置である。１０こ
の装置を用いて分析する場合、正イオンまたは負イオン
を測定して試料表面の情報を得るわけであるが、当然の
ことながら、正確な分析を期するためには、正負両イオ
ンを測定するのが望ましい。Among these, quadrupole mass spectrometers have the characteristics of being cheaper, smaller and lighter, and capable of high-speed analysis than other types of mass spectrometers, and residual gas analyzers (RGA),
It is used in gas chromatograph mass spectrometers (GC-MS), secondary ion mass spectrometers (SIMS), etc. Among these, SIMS is a device that has rapidly developed as a solid surface analysis method, and is applied to the characterization of thin films and semiconductors5. SIMS irradiates the sample to be analyzed with high-energy primary ions,
This device performs mass spectrometry on ions of constituent elements of a sample released from the sample surface during sputtering. 10 When performing analysis using this device, information on the sample surface is obtained by measuring positive or negative ions.Of course, in order to ensure accurate analysis, it is necessary to measure both positive and negative ions. It is desirable to do so.
１５ところで、ＳＩＭＳの原理上、破壊分析であるため
、正負両イオンを測定するには、これらを同時に測定す
ることが必要となる。15. By the way, since SIMS is a destructive analysis in principle, in order to measure both positive and negative ions, it is necessary to measure them simultaneously.
従来、正負両イオンを同時に測定するには、２個の質量
分析計を用いているが、四重極質量分析クｏ 計は、安
価であるといつても１台数百万円（質量分析範囲１〜３
００ａ、ｍ、ｕ）を要し、また正負両イオンは、できる
だけ同一条件（同−質量分解能など）で測定するべきで
あるなどのため、一般には普及していない。Conventionally, two mass spectrometers are used to measure both positive and negative ions simultaneously, but quadrupole mass spectrometers are inexpensive, costing several million yen per unit (mass spectrometers). Range 1-3
00a, m, u), and both positive and negative ions should be measured under the same conditions (same mass resolution, etc.) as much as possible, so it is not widely used.
２５本発明は、これら正負両イオンの同時測定を可能に
するもので、四重極電極の質量分離の原理が、イオンの
入射方向に依存しないことを利用して、１台の四重極電
極で、正負両イオンを同時に測定する装置を提供するも
のである。25 The present invention enables simultaneous measurement of both positive and negative ions, and takes advantage of the fact that the principle of mass separation of quadrupole electrodes does not depend on the direction of ion incidence. This provides a device that measures both positive and negative ions at the same time.
３０以下本発明をその実施例により説明する。The present invention will be explained below with reference to Examples.
第１図は本発明の一実施例のＳＩＭＳの構成を示す。１
は試料であり、これに数ＫＶ〜数１引■に加速した一次
イオン２を衝撃すると、スパッタリングに伴つて二次イ
オンが放出される。FIG. 1 shows the configuration of SIMS according to an embodiment of the present invention. 1
is a sample, and when it is bombarded with primary ions 2 accelerated to several KV to several tens of tens of kilovolts, secondary ions are emitted as a result of sputtering.
放出さ３５れた正の二次イオン３は、アインツエルレン
ズ４で収束され、１２７０屑形静電場エネルギーフィル
タ５で０〜１０ｅＶのイオンのみが収束され四重極電極
６に入射する。四重極電極６で質量分離された正イオン
は１２７四扇形静電場７に入射し、偏向され扇形静電場
７のグリッド８を通過し、スリツト９を通つて検出器１
０で検出される。一方、正イオンと同時に放出された負
イオン１１は、アインツエルレンズ１２で収束され、扇
形静電場７でエネルギー選択され、−１０〜０ｅＶのエ
ネルギーを持つ負イオンが、四重極電極６に導入され質
量分離される。The emitted positive secondary ions 3 are converged by an Einzel lens 4, and only 0 to 10 eV ions are converged by a 1270 dust type electrostatic field energy filter 5 and enter the quadrupole electrode 6. The positive ions that have been mass-separated by the quadrupole electrode 6 enter the 127 sector-shaped electrostatic field 7, are deflected, pass through the grid 8 of the sector-shaped electrostatic field 7, and pass through the slit 9 to the detector 1.
Detected at 0. On the other hand, the negative ions 11 released simultaneously with the positive ions are focused by the Einzel lens 12, and their energy is selected by the fan-shaped electrostatic field 7, and the negative ions with an energy of -10 to 0 eV are introduced into the quadrupole electrode 6. and mass separated.
質量分離された負イオンは、扇形静電場５に入射し、グ
リッド１３を通つてスリツト１４を通過し、検出器１５
で検出される。ここで使用した本発明のグリッド状導電
材料で構成したイオン偏向電極の一実施例である扇形静
電場電極５と、検出器１５の拡大図を第２図に示す。The mass-separated negative ions enter a fan-shaped electrostatic field 5, pass through a grid 13, a slit 14, and a detector 15.
Detected in FIG. 2 shows an enlarged view of the fan-shaped electrostatic field electrode 5, which is an example of the ion deflection electrode constructed of the grid-shaped conductive material of the present invention used here, and the detector 15.
以上述べたように、本発明によれば、唯一の四重極電極
で、正負両イオンの同時質量分析行なうことができるの
で、分析装置製作費が安くできる。As described above, according to the present invention, since simultaneous mass spectrometry of both positive and negative ions can be performed using only one quadrupole electrode, the manufacturing cost of the analyzer can be reduced.
また、本発明の原理土、四重極電極に印加する高周波と
直流電圧のバランスが同じ条件で、正負両イオンを質量
分離するため、得られる正負イオンの質量スペクトルは
、正負同一の質量分解能、イオン透過率を保持して検出
、測定できる。In addition, the principle of the present invention is to mass-separate both positive and negative ions under the same balance of high frequency and DC voltage applied to the quadrupole electrode, so that the obtained mass spectra of positive and negative ions have the same mass resolution, Detection and measurement can be performed while maintaining ion permeability.
第１図は本発明の一実施例の二次イオン質量分析計の概
略構成を示す図、第２図はその要部の拡大図である。
１・・・・・・試料、２・・・・・・一次イオン、４，
１２・・・・・・アインツエルレンズ、５，７・・・・
・・扇形静電場形エネルギーフイルタ、８，１３・・・
・・・グリツド、９，１４・・・・・・コレクタースリ
ツト、１０，１５・・・・・・検出器。FIG. 1 is a diagram showing a schematic configuration of a secondary ion mass spectrometer according to an embodiment of the present invention, and FIG. 2 is an enlarged view of the main parts thereof. 1...sample, 2...primary ion, 4,
12...Einzel lens, 5,7...
・・Sector-shaped electrostatic field type energy filter, 8, 13...
...Grid, 9,14...Collector slit, 10,15...Detector.
Claims (1)
より試料から発生した正負イオンのうち正イオンを案内
する第１の案内手段と、負イオンを案内する第２の案内
手段と、前記第１及び第２の案内手段から入射した正及
び負のイオンを透過し、かつ透過した正及び負のイオン
をそれぞれ第２及び第１の案内手段へ導くように前記第
１及び第２の案内手段の間に設けられた四重極電極とよ
り成り、前記第１及び第２の案内手段に、透過した負及
び正イオンを検出する手段をそれぞれ設けたことを特徴
とする四重極質量分析装置。1 means for bombarding a sample with ions, a first guide means for guiding positive ions among the positive and negative ions generated from the sample by the bombardment of the ions, a second guide means for guiding negative ions, and a second guide means for guiding negative ions; and the first and second guide means so as to transmit positive and negative ions incident from the second guide means and guide the transmitted positive and negative ions to the second and first guide means, respectively. 1. A quadrupole mass spectrometer comprising a quadrupole electrode provided between the first and second guiding means, wherein means for detecting transmitted negative and positive ions are respectively provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54092064A JPS5913151B2 (en) | 1979-07-19 | 1979-07-19 | quadrupole mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54092064A JPS5913151B2 (en) | 1979-07-19 | 1979-07-19 | quadrupole mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5615542A JPS5615542A (en) | 1981-02-14 |
| JPS5913151B2 true JPS5913151B2 (en) | 1984-03-28 |
Family
ID=14044037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54092064A Expired JPS5913151B2 (en) | 1979-07-19 | 1979-07-19 | quadrupole mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5913151B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0132123Y2 (en) * | 1985-03-12 | 1989-10-02 | ||
| JPS6231935A (en) * | 1985-08-05 | 1987-02-10 | Nippon Telegr & Teleph Corp <Ntt> | Secondary ion mass spectrometer |
| US6051057A (en) * | 1997-05-16 | 2000-04-18 | Seiko Epson Corporation | Ink jet recording ink |
-
1979
- 1979-07-19 JP JP54092064A patent/JPS5913151B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5615542A (en) | 1981-02-14 |
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