JPS572523A - Pattern forming apparatus - Google Patents

Pattern forming apparatus

Info

Publication number
JPS572523A
JPS572523A JP7662180A JP7662180A JPS572523A JP S572523 A JPS572523 A JP S572523A JP 7662180 A JP7662180 A JP 7662180A JP 7662180 A JP7662180 A JP 7662180A JP S572523 A JPS572523 A JP S572523A
Authority
JP
Japan
Prior art keywords
light
lens
cells
small cells
liquid crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7662180A
Other languages
Japanese (ja)
Inventor
Yukihiro Oketa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Hitachi Ome Electronic Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd, Hitachi Ome Electronic Co Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP7662180A priority Critical patent/JPS572523A/en
Publication of JPS572523A publication Critical patent/JPS572523A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To accurately form a desired pattern with a transmitted light by forming an arbitrary shape with a liquid crystal panel made of a plurality of small cells and emitting a light thereto. CONSTITUTION:A light from a light source 1 become a coherent light via a lens 2, which is incided vertically to a liquid crystal panel 3 made of small cells, is transmitted through only the cells, to which a voltage is applied, the light thus passed through the cells is condensed as an image on the resist of a chrominum plate on a stage 6 through a lens 4, and a mask pattern is thus formed. When the voltage is thus applied to the small cells to become a desired shape and the contraction factor of the lens 4 is increased, a desired mask pattern can be arbitrarily and accurately formed in a short time.
JP7662180A 1980-06-09 1980-06-09 Pattern forming apparatus Pending JPS572523A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7662180A JPS572523A (en) 1980-06-09 1980-06-09 Pattern forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7662180A JPS572523A (en) 1980-06-09 1980-06-09 Pattern forming apparatus

Publications (1)

Publication Number Publication Date
JPS572523A true JPS572523A (en) 1982-01-07

Family

ID=13610413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7662180A Pending JPS572523A (en) 1980-06-09 1980-06-09 Pattern forming apparatus

Country Status (1)

Country Link
JP (1) JPS572523A (en)

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