JPS5724809A - Shape detector - Google Patents

Shape detector

Info

Publication number
JPS5724809A
JPS5724809A JP9997980A JP9997980A JPS5724809A JP S5724809 A JPS5724809 A JP S5724809A JP 9997980 A JP9997980 A JP 9997980A JP 9997980 A JP9997980 A JP 9997980A JP S5724809 A JPS5724809 A JP S5724809A
Authority
JP
Japan
Prior art keywords
pickup element
height
slit
shape
galvanomirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9997980A
Other languages
Japanese (ja)
Other versions
JPS637321B2 (en
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Sohei Ikeda
Satoru Ezaki
Osamu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9997980A priority Critical patent/JPS5724809A/en
Priority to US06/286,068 priority patent/US4472056A/en
Publication of JPS5724809A publication Critical patent/JPS5724809A/en
Publication of JPS637321B2 publication Critical patent/JPS637321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

PURPOSE:To enable the detection of the shape of an object at a high detecting sensitivity, by a method wherein a pickup element, which is positioned in parallel to a slit image, self-scans in the longitudinal direction of the object, and scanning in a direction of a height is performed by means of a galvanomirror. CONSTITUTION:An one-domentional pickup element 13 is located in parallel to a slit image 3, and a galvanomirror 12 is positioned so that a direction of a height of an object 2 can be scanned. In this constitution, a slit light is projected from a slit projector 1, and a bright line 3, formed on the object 2, is detected from the oblique side by means of an image formation lens 8. The pickup element 13 located on a real picture surface is caused to self-scan in a longitudinal direction, and a scanning in a direction of a height is conducted by means of a mirror 12. A video signal from the pickup element 13 is outputted as a shape waveform by means of a shape extract circuit 17. This enables the pickup element 13 to take a sufficient long trigger time, and thereby a detective sensitivity can be improved.
JP9997980A 1980-07-23 1980-07-23 Shape detector Granted JPS5724809A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9997980A JPS5724809A (en) 1980-07-23 1980-07-23 Shape detector
US06/286,068 US4472056A (en) 1980-07-23 1981-07-23 Shape detecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9997980A JPS5724809A (en) 1980-07-23 1980-07-23 Shape detector

Publications (2)

Publication Number Publication Date
JPS5724809A true JPS5724809A (en) 1982-02-09
JPS637321B2 JPS637321B2 (en) 1988-02-16

Family

ID=14261780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9997980A Granted JPS5724809A (en) 1980-07-23 1980-07-23 Shape detector

Country Status (1)

Country Link
JP (1) JPS5724809A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381181A (en) * 1976-12-06 1978-07-18 Mitsubishi Rayon Co Inspecting method and apparatus for running flat articles
JPS54114264A (en) * 1978-02-27 1979-09-06 Nippon Steel Corp Screw inspection method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381181A (en) * 1976-12-06 1978-07-18 Mitsubishi Rayon Co Inspecting method and apparatus for running flat articles
JPS54114264A (en) * 1978-02-27 1979-09-06 Nippon Steel Corp Screw inspection method

Also Published As

Publication number Publication date
JPS637321B2 (en) 1988-02-16

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