JPS5723850A - Gas sensitive film and its manufacture - Google Patents

Gas sensitive film and its manufacture

Info

Publication number
JPS5723850A
JPS5723850A JP9924580A JP9924580A JPS5723850A JP S5723850 A JPS5723850 A JP S5723850A JP 9924580 A JP9924580 A JP 9924580A JP 9924580 A JP9924580 A JP 9924580A JP S5723850 A JPS5723850 A JP S5723850A
Authority
JP
Japan
Prior art keywords
oxide
ultrafine particle
sensitive film
film
evaporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9924580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152934B2 (cs
Inventor
Kuni Ogawa
Atsushi Abe
Masahiro Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9924580A priority Critical patent/JPS5723850A/ja
Publication of JPS5723850A publication Critical patent/JPS5723850A/ja
Publication of JPS6152934B2 publication Critical patent/JPS6152934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP9924580A 1980-07-18 1980-07-18 Gas sensitive film and its manufacture Granted JPS5723850A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9924580A JPS5723850A (en) 1980-07-18 1980-07-18 Gas sensitive film and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9924580A JPS5723850A (en) 1980-07-18 1980-07-18 Gas sensitive film and its manufacture

Publications (2)

Publication Number Publication Date
JPS5723850A true JPS5723850A (en) 1982-02-08
JPS6152934B2 JPS6152934B2 (cs) 1986-11-15

Family

ID=14242306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9924580A Granted JPS5723850A (en) 1980-07-18 1980-07-18 Gas sensitive film and its manufacture

Country Status (1)

Country Link
JP (1) JPS5723850A (cs)

Also Published As

Publication number Publication date
JPS6152934B2 (cs) 1986-11-15

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