JPS5723229A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS5723229A
JPS5723229A JP9691280A JP9691280A JPS5723229A JP S5723229 A JPS5723229 A JP S5723229A JP 9691280 A JP9691280 A JP 9691280A JP 9691280 A JP9691280 A JP 9691280A JP S5723229 A JPS5723229 A JP S5723229A
Authority
JP
Japan
Prior art keywords
film
adhesion
concentration
semiconductor device
polyimide resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9691280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331932B2 (enrdf_load_stackoverflow
Inventor
Genichi Adachi
Nobuo Mukai
Naoyuki Kokuni
Shinetsu Fujieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9691280A priority Critical patent/JPS5723229A/ja
Publication of JPS5723229A publication Critical patent/JPS5723229A/ja
Publication of JPS6331932B2 publication Critical patent/JPS6331932B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP9691280A 1980-07-17 1980-07-17 Semiconductor device and its manufacture Granted JPS5723229A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9691280A JPS5723229A (en) 1980-07-17 1980-07-17 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9691280A JPS5723229A (en) 1980-07-17 1980-07-17 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5723229A true JPS5723229A (en) 1982-02-06
JPS6331932B2 JPS6331932B2 (enrdf_load_stackoverflow) 1988-06-27

Family

ID=14177566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9691280A Granted JPS5723229A (en) 1980-07-17 1980-07-17 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5723229A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61232646A (ja) * 1985-04-09 1986-10-16 Nec Corp 樹脂封止型半導体集積回路装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61232646A (ja) * 1985-04-09 1986-10-16 Nec Corp 樹脂封止型半導体集積回路装置

Also Published As

Publication number Publication date
JPS6331932B2 (enrdf_load_stackoverflow) 1988-06-27

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