JPS57208181A - Manufacture of photoelectric conversion film - Google Patents

Manufacture of photoelectric conversion film

Info

Publication number
JPS57208181A
JPS57208181A JP56092300A JP9230081A JPS57208181A JP S57208181 A JPS57208181 A JP S57208181A JP 56092300 A JP56092300 A JP 56092300A JP 9230081 A JP9230081 A JP 9230081A JP S57208181 A JPS57208181 A JP S57208181A
Authority
JP
Japan
Prior art keywords
substrate
approx
temperature
amorphous silicon
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56092300A
Other languages
English (en)
Inventor
Yukio Takasaki
Taiji Shimomoto
Yasuo Tanaka
Akira Sasano
Toshihisa Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56092300A priority Critical patent/JPS57208181A/ja
Priority to KR8202660A priority patent/KR900000832B1/ko
Priority to US06/388,619 priority patent/US4457949A/en
Priority to EP82303138A priority patent/EP0067722B1/en
Priority to DE8282303138T priority patent/DE3268520D1/de
Priority to CA000405375A priority patent/CA1187384A/en
Publication of JPS57208181A publication Critical patent/JPS57208181A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233—Manufacture of photoelectric screens or charge-storage screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP56092300A 1981-06-17 1981-06-17 Manufacture of photoelectric conversion film Pending JPS57208181A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP56092300A JPS57208181A (en) 1981-06-17 1981-06-17 Manufacture of photoelectric conversion film
KR8202660A KR900000832B1 (ko) 1981-06-17 1982-06-15 광전변환막의 제조방법
US06/388,619 US4457949A (en) 1981-06-17 1982-06-15 Method of producing a photoelectric conversion layer
EP82303138A EP0067722B1 (en) 1981-06-17 1982-06-16 A method of producing a photoelectric conversion layer and a method of producing an image pickup device
DE8282303138T DE3268520D1 (en) 1981-06-17 1982-06-16 A method of producing a photoelectric conversion layer and a method of producing an image pickup device
CA000405375A CA1187384A (en) 1981-06-17 1982-06-17 Method of producing a photoelectric conversion layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56092300A JPS57208181A (en) 1981-06-17 1981-06-17 Manufacture of photoelectric conversion film

Publications (1)

Publication Number Publication Date
JPS57208181A true JPS57208181A (en) 1982-12-21

Family

ID=14050554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56092300A Pending JPS57208181A (en) 1981-06-17 1981-06-17 Manufacture of photoelectric conversion film

Country Status (6)

Country Link
US (1) US4457949A (ja)
EP (1) EP0067722B1 (ja)
JP (1) JPS57208181A (ja)
KR (1) KR900000832B1 (ja)
CA (1) CA1187384A (ja)
DE (1) DE3268520D1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551352A (en) * 1985-01-17 1985-11-05 Rca Corporation Method of making P-type hydrogenated amorphous silicon
US5464667A (en) * 1994-08-16 1995-11-07 Minnesota Mining And Manufacturing Company Jet plasma process and apparatus
US6203898B1 (en) * 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2394173A1 (fr) * 1977-06-06 1979-01-05 Thomson Csf Procede de fabrication de dispositifs electroniques qui comportent une couche mince de silicium amorphe et dispositif electronique obtenu par un tel procede
JPS54150995A (en) * 1978-05-19 1979-11-27 Hitachi Ltd Photo detector
JPS5728368A (en) * 1980-07-28 1982-02-16 Hitachi Ltd Manufacture of semiconductor film

Also Published As

Publication number Publication date
KR840000989A (ko) 1984-03-26
EP0067722A2 (en) 1982-12-22
CA1187384A (en) 1985-05-21
DE3268520D1 (en) 1986-02-27
EP0067722A3 (en) 1983-03-23
EP0067722B1 (en) 1986-01-15
US4457949A (en) 1984-07-03
KR900000832B1 (ko) 1990-02-17

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