TW243470B - Film layer forming device and method for forming a film layer - Google Patents

Film layer forming device and method for forming a film layer

Info

Publication number
TW243470B
TW243470B TW83105933A TW83105933A TW243470B TW 243470 B TW243470 B TW 243470B TW 83105933 A TW83105933 A TW 83105933A TW 83105933 A TW83105933 A TW 83105933A TW 243470 B TW243470 B TW 243470B
Authority
TW
Taiwan
Prior art keywords
film layer
forming
vaporization
forming device
vaporize
Prior art date
Application number
TW83105933A
Other languages
Chinese (zh)
Inventor
Michio Minato
Masaharu Oishi
Masaru Sato
Original Assignee
Vancuum Metallurg Co Ltd
Tigold Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vancuum Metallurg Co Ltd, Tigold Corp filed Critical Vancuum Metallurg Co Ltd
Application granted granted Critical
Publication of TW243470B publication Critical patent/TW243470B/en

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

A film layer forming device, which is characterized in that the following components are installed in the vacuum tank (51): a substrate (14), which is connect to a bias power source (15); a first vaporization source (22), which uses hollow anode discharge electric gun (21) to vaporize vaporization material in order to cover a layer of ceramic membrane on the substrate (14); a second vaporization source (32), which is used to assist the hollow anode discharge electric gun (21) and uses resistance heating to vaporize vaporization material in order to cover a layer of metal membrane on the ceramic membrane.
TW83105933A 1994-04-06 1994-06-30 Film layer forming device and method for forming a film layer TW243470B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9370194A JPH07278800A (en) 1994-04-06 1994-04-06 Device for forming coated film and method therefor

Publications (1)

Publication Number Publication Date
TW243470B true TW243470B (en) 1995-03-21

Family

ID=14089715

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83105933A TW243470B (en) 1994-04-06 1994-06-30 Film layer forming device and method for forming a film layer

Country Status (2)

Country Link
JP (1) JPH07278800A (en)
TW (1) TW243470B (en)

Cited By (10)

* Cited by examiner, † Cited by third party
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US7173370B2 (en) 2001-02-01 2007-02-06 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US7196360B2 (en) 2001-02-08 2007-03-27 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US7332857B2 (en) 2001-01-18 2008-02-19 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and manufacturing method thereof
US7342355B2 (en) 2000-12-28 2008-03-11 Semiconductor Energy Laboratory Co., Ltd. Light emitting device having organic light emitting material with mixed layer
US7399991B2 (en) 2001-02-22 2008-07-15 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting device and display device using the same
US7432116B2 (en) 2001-02-21 2008-10-07 Semiconductor Energy Laboratory Co., Ltd. Method and apparatus for film deposition
US7550173B2 (en) 2001-01-17 2009-06-23 Semiconductor Energy Laboratory Co., Ltd. Luminescent device and method of manufacturing same
US7629025B2 (en) 2001-02-08 2009-12-08 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method
US8310147B2 (en) 2000-12-28 2012-11-13 Semiconductor Energy Laboratory Co., Ltd. Luminescent device
US8354786B2 (en) 2001-02-01 2013-01-15 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7915807B2 (en) 2000-12-28 2011-03-29 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
US9362518B2 (en) 2000-12-28 2016-06-07 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
US7342355B2 (en) 2000-12-28 2008-03-11 Semiconductor Energy Laboratory Co., Ltd. Light emitting device having organic light emitting material with mixed layer
US9209418B2 (en) 2000-12-28 2015-12-08 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
US8878431B2 (en) 2000-12-28 2014-11-04 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
US8432094B2 (en) 2000-12-28 2013-04-30 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
US8310147B2 (en) 2000-12-28 2012-11-13 Semiconductor Energy Laboratory Co., Ltd. Luminescent device
US7550173B2 (en) 2001-01-17 2009-06-23 Semiconductor Energy Laboratory Co., Ltd. Luminescent device and method of manufacturing same
US7332857B2 (en) 2001-01-18 2008-02-19 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and manufacturing method thereof
US8674348B2 (en) 2001-02-01 2014-03-18 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US7173370B2 (en) 2001-02-01 2007-02-06 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US7858977B2 (en) 2001-02-01 2010-12-28 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US9608224B2 (en) 2001-02-01 2017-03-28 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US8174007B2 (en) 2001-02-01 2012-05-08 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US7459722B2 (en) 2001-02-01 2008-12-02 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US8354786B2 (en) 2001-02-01 2013-01-15 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US9349977B2 (en) 2001-02-01 2016-05-24 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having mixed layer including hole transporting compound
US9219241B2 (en) 2001-02-01 2015-12-22 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting element and display device using the element
US7456425B2 (en) 2001-02-08 2008-11-25 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US8513648B2 (en) 2001-02-08 2013-08-20 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US7196360B2 (en) 2001-02-08 2007-03-27 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US7629025B2 (en) 2001-02-08 2009-12-08 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method
US7432116B2 (en) 2001-02-21 2008-10-07 Semiconductor Energy Laboratory Co., Ltd. Method and apparatus for film deposition
US7399991B2 (en) 2001-02-22 2008-07-15 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting device and display device using the same
US7663149B2 (en) 2001-02-22 2010-02-16 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting device and display device using the same

Also Published As

Publication number Publication date
JPH07278800A (en) 1995-10-24

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